Imprint Template Side Surface Liquid-Repellent Coating
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Solution Overview
Problem
In the imprinting method for forming fine patterns on semiconductor substrates, the template used to press against a liquid transfer-receiving material often experiences material seepage and adhesion issues, leading to pattern abnormalities and template damage due to raised portions and foreign matter contamination.
Innovation Solution
A template manufacturing apparatus and method that applies a liquid-repellent material to the side surfaces of the template's convex portions to prevent liquid transfer-receiving material adhesion, using a fluorine-based solvent to dissolve and remove non-liquid-repellent components, thereby forming a liquid-repellent layer that avoids the concavo-convex pattern and enhances template cleanliness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the template is pressed against the liquid transfer-receiving material, then the concavo-convex pattern is transferred to the transfer-receiving material, but the liquid transfer-receiving material seeps out from the end of the convex portion and adheres to the side surface, causing pattern abnormality
Solution Approach 1:
The patent applies a liquid-repellent coating to the side surface of the convex portion before the imprinting process. This preliminary treatment creates a repulsive effect that prevents the liquid transfer-receiving material from adhering to the side surface during pressing, thereby eliminating the harmful adhesion effect while maintaining pattern transfer accuracy
Solution Approach 2:
The liquid-repellent coating acts as an intermediary substance between the liquid transfer-receiving material and the template side surface. This intermediary layer prevents direct contact and adhesion between the liquid material and the template, allowing the pressing process to proceed without harmful side effects
2Productivity
If the template is separated from the transfer-receiving material, then the pattern transfer is completed, but the raised portion of the transfer-receiving material sticks to the template and may become dust, causing template damage or foreign matter contamination
Solution Approach 1:
By pre-applying the liquid-repellent coating to the side surface, the patent creates a protective barrier that prevents the liquid material from rising and adhering to the template during separation. This preliminary protection ensures that the template remains intact and free from foreign matter contamination throughout the printing process
Solution Approach 2:
The liquid-repellent coating is applied in advance to the template side surface before any imprinting operations. This preliminary action establishes a protective property that persists through multiple printing cycles, continuously preventing adhesion and template contamination without requiring repeated interventions
3Object-generated harmful factors
If a liquid-repellent material is applied to the side surface of the convex portion, then liquid adhesion is prevented, but the concavo-convex pattern may be damaged or foreign matter may enter the pattern
Solution Approach 1:
The patent applies the liquid-repellent coating selectively and locally to the side surface of the convex portion, carefully controlling the application to avoid the top surface where the concavo-convex pattern is formed. This localized treatment provides adhesion prevention exactly where needed while preserving the integrity of the pattern-forming surface
Solution Approach 2:
The coating is applied in a controlled manner that covers the side surface adequately to prevent liquid adhesion, but stops short of covering the pattern-forming top surface. This partial application ensures sufficient protection against liquid adhesion while avoiding damage to or contamination of the concavo-convex pattern
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents pattern abnormalities by repelling the liquid transfer-receiving material from the template's side surfaces, reducing template damage and foreign matter contamination, and improving the liquid-repellent properties of the template, ensuring accurate and consistent pattern transfer.
Implementation Method 1
a liquid-repellent material to the side surfaces of the convex portion so as to avoid the concavo-convex pattern
Implementation Method 2
using a fluorine-based solvent to dissolve and remove non-liquid-repellent components
Data Source
AI summary
According to one embodiment, an imprint template manufacturing apparatus includes: a supply head that supplies a liquid-repellent material in liquid form to a template having a convex portion where a concavo-convex pattern is formed on a stage; a moving mechanism that moves the stage and the supply head relatively in a direction along the stage; a controller that controls the supply head and the moving mechanism such that the supply head applies the liquid-repellent material to at least a side surface of the convex portion so as to avoid the concavo-convex pattern; and a cleaning unit that supplies a liquid to the template coated with the liquid-repellent material. The liquid-repellent material contains a liquid-repellent component and a non-liquid-repellent component that react with the surface of the template, and a volatile solvent that dissolves the liquid-repellent component. The liquid is a fluorine-based volatile solvent that dissolves the non-liquid-repellent component.