Imprint Apparatus Tilt Correction Using Substrate Driving Force
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Solution Overview
Problem
Existing imprint technologies face challenges in accurately reducing the relative tilt between a mold and a substrate due to factors such as substrate warpage, deformation, and imprint conditions, leading to inconsistent moment generation and reduced overlay accuracy.
Innovation Solution
An imprint apparatus with a mold and substrate holding unit, driven by actuators, employs a controller to adjust the mold and substrate positions using driving forces and rotations to correct the relative tilt, ensuring precise alignment and contact.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the substrate holding unit is tilted to compensate for substrate warpage, then the relative tilt between mold and substrate is reduced, but the overlay accuracy deteriorates due to inconsistent moment generation
Solution Approach 1:
The invention introduces a dynamic tilt correction mechanism where the mold holding unit can be tilted in real-time based on the actual contact position detected during the imprinting process. This dynamic adjustment allows the system to adapt to variations in substrate warpage and imprint material thickness, ensuring consistent overlay accuracy across different imaging conditions.
Solution Approach 2:
The invention implements a feedback control system that detects the actual contact position between the mold and imprint material, then uses this information to calculate and apply the appropriate tilt correction to the mold holding unit. This closed-loop feedback ensures that the tilt correction is based on actual measured values rather than assumed fixed parameters, improving both overlay accuracy and moment generation consistency.
2Manufacturing precision
If the mold is pressed firmly onto the imprint material, then the pattern formation is improved, but the relative tilt changes due to pressing force variations
Solution Approach 1:
The invention performs preliminary tilt correction by calculating the expected contact position based on predetermined tilt values before the actual imprinting process begins. This preliminary action allows the mold holding unit to be pre-positioned at the correct tilt angle, ensuring that when the mold is pressed onto the imprint material, the relative tilt remains stable and the pattern formation achieves high precision.
Solution Approach 2:
The invention dynamically adjusts the tilt parameter of the mold holding unit based on the detected contact position and the thickness of the imprint material. By changing the tilt parameter in response to measured values, the system maintains stable relative tilt while achieving firm pressing for optimal pattern formation.
3Adaptability or versatility
If the imprint material thickness is varied to optimize pattern formation, then the manufacturing flexibility is improved, but the relative tilt between mold and substrate changes
Solution Approach 1:
The invention introduces a dynamic tilt adjustment mechanism that responds to variations in imprint material thickness. When the material thickness changes, the system detects the new contact position and automatically adjusts the mold holding unit tilt to compensate, maintaining precise relative tilt control while allowing manufacturing flexibility.
Solution Approach 2:
The invention changes the tilt parameter of the mold holding unit in response to variations in imprint material thickness. By making the tilt parameter variable and adaptive to the actual material thickness, the system achieves both manufacturing flexibility and precise relative tilt control.
Data Source
AI summary
An imprint apparatus according to the present invention includes a controller configured to perform a contacting step of moving at least one of a mold holding unit and a substrate holding unit by at least one of a mold driving unit and a substrate driving unit such that a mold and an imprint material on a substrate surface are brought into contact with each other, an obtaining step of obtaining a driving force in a first direction parallel to the substrate surface for the substrate holding unit by the substrate driving unit after performing the contacting step, and a tilt correcting step of rotating the mold holding unit about a second direction perpendicular to the first direction in the substrate surface by the mold driving unit based on a magnitude of the driving force obtained in the obtaining step.