Imprint Apparatus Viscosity Control via Light Irradiation
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Solution Overview
Problem
The existing imprint methods face challenges in achieving a stable imprint process across multiple shot regions due to differences in the spread of imprint material caused by varying times from supply to formation, leading to inconsistent results.
Innovation Solution
An imprint apparatus that uses a light irradiator to adjust the viscosity of the imprint material before and during the curing process, ensuring consistent spread across multiple shot regions by controlling the supply and forming processes, utilizing preliminary light to modify viscosity without curing the material.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the imprint material is supplied in advance to multiple shot regions, then throughput is improved, but the spread of the imprint material becomes inconsistent across shot regions due to time differences
Solution Approach 1:
The patent applies light irradiation to change the viscosity parameter of the imprint material. By irradiating the substrate with light after supplying the imprint material but before the forming process, the viscosity of the imprint material is modified to reduce spread differences across shot regions. This parameter change allows the material to maintain consistent spread characteristics even when supplied at different times to different regions.
Solution Approach 2:
The patent performs preliminary light irradiation to adjust the viscosity of the imprint material before the actual forming process begins. This preliminary action of changing the material property (viscosity) through light exposure ensures that when the forming process occurs, the imprint material has the appropriate viscosity for consistent spread, thereby resolving the inconsistency caused by sequential supply to multiple shot regions.
2Adaptability or versatility
If the time from supplying the imprint material to forming varies across shot regions, then processing flexibility is improved, but stable imprint process becomes difficult to achieve
Solution Approach 1:
The patent uses light irradiation to dynamically change the viscosity parameter of the imprint material based on the timing of each shot region's processing. By adjusting the viscosity through controlled light exposure, the system can accommodate varying time intervals between supply and forming operations while maintaining stable imprint results across all regions.
Solution Approach 2:
The patent introduces a dynamic control mechanism where the viscosity of the imprint material is adjusted in real-time through light irradiation. This dynamic parameter adjustment allows the system to adapt to different processing timelines for each shot region while maintaining overall process stability, enabling both flexibility and reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces the difference in spread among shot regions, enabling a stable and efficient imprint process by controlling the viscosity of the imprint material, thereby improving throughput and consistency.
Implementation Method 1
a light irradiator configured to irradiate the substrate with light that changes a viscosity of the imprint material without curing the imprint material
Implementation Method 2
control a forming process of forming the imprint material using the mold and curing the imprint material
Data Source
AI summary
The present invention provides an imprint apparatus that forms an imprint material on a substrate using a mold, comprising: a light irradiator configured to irradiate the substrate with light that changes a viscosity of the imprint material without curing the imprint material; a supplier configured to supply the imprint material onto the substrate; and a controller configured to, after controlling a supply process of supplying the imprint material to a plurality of shot regions in the substrate, control a forming process of forming the imprint material using the mold and curing the imprint material for each shot region, wherein the supply process includes first processing of sequentially supplying the imprint material to the plurality of shot regions by the supplier, and second processing of irradiating, with the light, a shot region to which the imprint material has been supplied.