Imprint Material Viscosity Control at Mold Mesa Edges
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In the imprint method for forming patterns on substrates using molds, there is a challenge in preventing the imprint material from protruding and adhering to the lateral surfaces of the mold, which can lead to foreign matter and uneven film thickness, affecting the accuracy and yield of the pattern formation.
Innovation Solution
An imprint apparatus that uses an optical system to apply irradiation light to the peripheral regions of the mold, increasing the viscosity of the imprint material without curing it, and a control unit to manage the timing and intensity of the light application across different zones around the mesa portion of the mold, preventing the material from adhering to the lateral surfaces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the imprint material is supplied onto the substrate and brought into contact with the mold, then the pattern can be formed on the substrate, but the imprint material may protrude from the mesa portion and adhere to the lateral surface of the mesa portion, causing foreign matters
Solution Approach 1:
The patent applies preliminary action by irradiating light to the peripheral region of the mesa portion before the imprint material reaches it. This pre-irradiation increases the viscosity of the imprint material in advance at the peripheral region, creating a barrier that prevents the material from protruding and adhering to the lateral surface of the mesa portion, thus preventing foreign matter generation before it occurs
Solution Approach 2:
The patent changes the physical parameter (viscosity) of the imprint material by irradiating light to the peripheral region of the mesa portion. This localized parameter change increases viscosity only at the boundary area, allowing the imprint material to be contained within the mesa portion while maintaining proper filling performance in the pattern region
2Manufacturing precision
If light is applied to the outer peripheral portion of the substrate to prevent spreading, then the imprint material does not spread to the outer peripheral portion, but it cannot prevent protrusion over the lateral surface of the mesa portion
Solution Approach 1:
The patent applies local quality by selectively irradiating light only to the peripheral region surrounding the mesa portion, not the entire substrate. This creates a localized viscosity increase precisely where needed at the mesa portion boundary, differentiating the properties of the peripheral region from the rest of the imprint material to prevent lateral surface adhesion
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively prevents the imprint material from protruding and adhering to the mold's lateral surfaces, maintaining the filling performance and improving the accuracy and yield of the pattern formation process.
Implementation Method 1
an optical system applying, to a peripheral region, irradiation light acting to increase viscosity of the imprint material
Data Source
AI summary
The present invention provides an imprint apparatus forming a pattern of an imprint material on a substrate by using a mold, the imprint apparatus including an optical system applying, to a peripheral region, irradiation light acing to increase viscosity of the imprint material, the peripheral region including an end of a mesa portion of the mold and surrounding the mesa portion in a state in which the mesa portion of the mold is held in contact with the imprint material, and a control unit controlling the optical system such that timings of applying the irradiation light to a plurality of zones in the peripheral region are different from each other, the zones being positioned at different distances from a center of the mesa portion, in the state in which the mesa portion of the mold is held in contact with the imprint material on the substrate.