Imprint Method Viscosity Control via Overlap Period
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Solution Overview
Problem
The existing imprint methods face challenges in achieving high overlay accuracy and throughput due to increased viscosity of the imprint material when deformation light and polymerization light are irradiated simultaneously, leading to longer alignment times and decreased accuracy.
Innovation Solution
The method involves controlling the alignment to include an overlap period where deformation light and polymerization light are applied simultaneously to the imprint material, with the polymerization light intensity adjusted based on the deformation light conditions to maintain target viscosity and improve alignment efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If deformation light and polymerization light are irradiated simultaneously to the imprint material during alignment, then the viscosity of the imprint material increases more than with polymerization light alone, but this causes a decrease in overlay accuracy and throughput due to longer alignment time
Solution Approach 1:
The patent applies periodic action by controlling the timing and intensity of polymerization light irradiation during the alignment process. The polymerization light is irradiated in a controlled manner during specific periods of alignment to maintain optimal viscosity without causing excessive thickening. This includes adjusting light intensity and irradiation duration to match the alignment timeline, ensuring viscosity remains within the target range throughout the alignment process.
Solution Approach 2:
The patent employs parameter changes by dynamically adjusting the intensity and duration of polymerization light irradiation based on the alignment progress. The light irradiation conditions are optimized to maintain the imprint material viscosity within a target range, preventing both insufficient viscosity (which would reduce alignment accuracy) and excessive viscosity (which would prolong alignment time). This involves real-time control of light parameters to match the specific needs of each alignment stage.
2Manufacturing precision
If polymerization light intensity is increased to maintain target viscosity during overlap period with deformation light, then overlay accuracy improves, but throughput may decrease due to longer curing time required
Solution Approach 1:
The patent applies periodic action by using pulsed or intermittent polymerization light irradiation during the alignment and curing process. Instead of continuous high-intensity irradiation, the light is delivered in controlled pulses that maintain viscosity for alignment while minimizing total curing time. This periodic irradiation pattern allows the material to maintain optimal properties during alignment periods while reducing overall exposure time, thereby improving throughput without sacrificing overlay accuracy.
Solution Approach 2:
The patent employs dynamics by making the polymerization light intensity adjustable and time-dependent. The light intensity is dynamically changed during the process - higher intensity during alignment to maintain viscosity and ensure accuracy, then adjusted to optimal curing intensity afterward. This dynamic control allows the system to adapt to different process stages, maintaining precision during alignment while optimizing for speed during curing, thus resolving the contradiction between accuracy and throughput.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances overlay accuracy and throughput by optimizing the viscosity of the imprint material during alignment, reducing the time required for alignment and improving the bonding strength between the substrate and mold.
Implementation Method 1
deformation light used to deform the shot region is applied to the substrate through the imprint material
Implementation Method 2
polymerization light used to increase a viscosity of the imprint material is applied to the imprint material
Implementation Method 3
curing the imprint material by irradiating the imprint material with curing light after the aligning
Data Source
AI summary
An imprint method of molding an imprint material on a shot region of a substrate using a mold, includes aligning the shot region and the mold in a state where the imprint material and a pattern region of the mold are in contact with each other; and curing the imprint material by irradiating the imprint material with curing light after the aligning. The aligning is controlled so as to include an overlap period during which a period during which deformation light used to deform the shot region is applied to the substrate through the imprint material and a period during which polymerization light used to increase a viscosity of the imprint material is applied to the imprint material overlap each other. The polymerization light to be applied to the imprint material is controlled in accordance with the deformation light to be applied to the imprint material during the overlap period.