Imprinted Substrates With Residue-Free Bonding Regions

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Solution Overview

Problem

The production of flow cells with nanoimprinted surfaces often results in residue left on bonding regions, leading to compromised seals, leaks, contamination, and increased manufacturing costs due to faulty bonding and template reuse issues.

Innovation Solution

Techniques such as peeling and selective reactive ion etching are employed to create substrate surfaces with reduced or no residue, ensuring high-quality bonding and improved manufacturing efficiency by producing residue-free regions for bonding, which enhances the sealing integrity and reduces material waste.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If nanoimprinting lithography is used to produce flow cells, then manufacturing precision and throughput are improved, but residue is left on bonding regions causing compromised seals and leaks

Engineering Contradiction:
Improvenanostructure precisionVSAvoidseal integrity
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The substrate surface is divided into distinct functional zones: imprinted regions containing nanostructures and residue-free bonding regions. This segmentation allows the bonding areas to be free of contamination while maintaining precise nanostructures in other areas, resolving the contradiction between manufacturing precision and seal integrity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Residue is selectively removed from bonding regions through etching processes, extracting the harmful contaminant while preserving the nanostructures. This extraction enables high-quality bonding without compromising the precision of the imprinted nanostructures.

Inventive Principle:
Principle #2Taking out (Extraction)

2Productivity

If traditional nanoimprinting is used, then production speed is increased, but bonding quality deteriorates due to residue contamination

Engineering Contradiction:
Improvemanufacturing throughputVSAvoidbonding quality
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

Residue removal is performed as a preliminary step before bonding, ensuring that bonding surfaces are clean before the bonding process occurs. This preliminary action prevents bonding defects without requiring slower processing speeds during the main manufacturing sequence.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

Manual or mechanical cleaning methods are replaced with plasma or chemical etching processes that automatically remove residue. This substitution maintains high throughput while ensuring consistent bonding quality across all substrates.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Strength

If residue removal steps are added to clean bonding regions, then bonding strength is improved, but manufacturing complexity and time increase

Engineering Contradiction:
Improvebonding strengthVSAvoidprocess complexity
Core Design Contradiction:
StrengthVSDevice complexity

Solution Approach 1:

The residue removal process is merged with existing manufacturing steps, such as combining etching with the nanoimprinting sequence. This integration achieves clean bonding surfaces without adding separate, complex processing stages, thereby maintaining bonding strength while limiting process complexity.

Inventive Principle:
Principle #5Merging (Combining)

4Ease of manufacture

If residue is not removed, then manufacturing costs are reduced, but product reliability decreases due to leaks and contamination

Engineering Contradiction:
Improvemanufacturing costVSAvoidproduct reliability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

Processing parameters are optimized to achieve effective residue removal at minimal cost. By adjusting etching time, power, or chemical concentration, the process removes sufficient residue to ensure reliability without excessive processing that would increase manufacturing costs.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The techniques result in flow cells capable of withstanding high pressures without leaking, reducing manufacturing costs, and enabling high-throughput production with improved bonding strength and reduced contamination risks.

Implementation Method 1

the etching may employ plasma for reactive ion etching

Methodology Applied
Scientific EffectReactive ion etching: Plasma

Data Source

PatentUS11878299B2Imprinted substrates
Publication Date: 2024.01.23 ILLUMINA INC
  • US11878299B2 patent drawing
  • US11878299B2 patent drawing
  • US11878299B2 patent drawing

AI summary

Imprinted substrates are often used to produce miniaturized devices for use in electrical, optic and biochemical applications. Imprinting techniques, such as nanoimprinting lithography, may leave residues in the surface of substrates that affect bonding and decrease the quality of the produced devices. An imprinted substrate with residue-free region, or regions with a reduced amount of residue for improved bonding quality is introduced. Methods to produce imprinted substrates without residues from the imprinting process are also introduced. Methods include physical exclusion methods, selective etching methods and energy application methods. These methods may produce residue-free regions in the surface of the substrate that can be used to produce higher strength bonding.