Imprinting Apparatus Fluid Separation Stage Flatness
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Solution Overview
Problem
The existing imprinting apparatus for display devices is prone to blurs on the substrate due to stage flatness issues, which degrade image quality and increase manufacturing costs due to the need for high-priced stages with good flatness.
Innovation Solution
An imprinting apparatus with a chamber unit, stage, and spraying unit that separates the substrate from the stage using fluid, allowing the mold member to contact the resin layer without being influenced by the stage's flatness, thereby reducing blurs and manufacturing costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a high-priced stage with good flatness is used, then blurs on the substrate are reduced, but manufacturing cost increases
Solution Approach 1:
A release film is introduced as an intermediary layer between the stage and the substrate. This release film has low friction characteristics that allow the substrate to be easily separated from the stage after imprinting, eliminating the need for expensive high-flatness stages while maintaining pattern formation quality
Solution Approach 2:
A spraying unit is used to spray gas or liquid between the stage and substrate, creating a separation force that prevents adhesion. This pneumatic/hydraulic approach enables easy substrate release without requiring expensive stage flatness specifications
2Manufacturing precision
If a high-priced stage with good flatness is used, then blurs on the substrate are reduced, but unit cost for the substrate increases
Solution Approach 1:
The release film serves as a mediator that prevents direct contact between the stage and substrate, reducing adhesion forces. This allows use of lower-cost stages while maintaining substrate quality and reducing unit cost
Solution Approach 2:
The requirement for high stage flatness is extracted from the system by introducing the release film, which takes over the function of preventing adhesion. This eliminates the need to invest in expensive high-flatness stages, reducing substrate unit cost
3Manufacturing precision
If the substrate is pressed against the stage, then the pattern is imprinted, but adhesion causes blurs due to stage flatness issues
Solution Approach 1:
The release film acts as an intermediary that reduces friction and adhesion between the stage and substrate. This prevents the substrate from adhering to stage irregularities, eliminating blurs while maintaining pattern imprinting quality
Solution Approach 2:
The system transitions from a static adhesion-based release mechanism to a dynamic spray-based separation mechanism. The spraying unit actively creates separation forces during the imprinting process, preventing adhesion-related blurs
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents blurs on the substrate, improving image quality and reducing manufacturing costs by eliminating the need for expensive stages with high flatness, while maintaining the ability to form high-quality patterns on the substrate.
Implementation Method 1
a first spraying unit for spraying fluid to separate the substrate supported by the stage from the stage
Data Source
AI summary
Disclosed is an imprinting apparatus and imprinting method using the same that prevent a process of forming a pattern on a substrate from being affected by flatness of a stage. The imprinting apparatus comprises a chamber unit in which a process of forming a pattern on a substrate is carried out; a stage for supporting the substrate on which a resin layer is formed; an installing member positioned above the stage and having a mold member attached to transform the resin layer so as to form the pattern on the substrate; and a first spraying unit for spraying fluid to separate the substrate supported by the stage from the stage, wherein the installing member moves the mold member in the direction getting near to the substrate separated from the stage so that the mold member and the resin layer are brought into contact with each other.