Imprinting Template Magnification Correction Using Response Coefficients
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Solution Overview
Problem
In imprinting lithography, the magnification response coefficient varies by template, requiring lengthy setup conditions to prevent positional slippage between template and substrate, as the coefficient must be calculated individually for each template.
Innovation Solution
An imprinting apparatus that calculates a magnification response coefficient using a learning template's flatness and creates a relational expression to correct the input adjustment value, allowing for accurate adjustment of template size and shape to minimize slippage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the magnification response coefficient is calculated individually for each template, then the positional slippage between layers is prevented, but the setup time becomes excessively long
Solution Approach 1:
The patent creates a database storing the relationship between template identification information and magnification response coefficients obtained from previous measurements. Instead of measuring each template individually, the system copies/retrieves the pre-measured coefficient data from the database based on the template's identification information, dramatically reducing setup time while maintaining measurement accuracy.
Solution Approach 2:
The patent performs magnification response coefficient measurements in advance for multiple templates and stores the results in a database before actual production. This preliminary action allows the system to retrieve pre-calculated coefficients during operation, eliminating the need for time-consuming individual measurements during setup while ensuring accurate slippage prevention.
2Manufacturing precision
If stress is applied to the side surface of the template to adjust magnification, then positional alignment is improved, but the complexity of the adjustment process increases
Solution Approach 1:
The patent uses a magnification measurement unit to measure the actual magnification of the template and feeds this information back to a correction value calculation unit. The system calculates a magnification correction value based on the measured magnification and applies it to automatically adjust the template magnification, replacing complex manual adjustment processes with an automated feedback control system.
Solution Approach 2:
The patent replaces manual mechanical adjustment of template magnification with an automated system that uses measurement data and calculated correction values to control the adjustment mechanism. This substitution of mechanical manual operation with an automated measurement-correction-control system reduces operational complexity while improving precision.
Data Source
AI summary
In an imprinting apparatus according to one embodiment, rear surfaces of first and second templates are suctioned. A correction information calculating device calculates a second response coefficient of the second template out of first response coefficients based on a flatness relational expression and flatness of the second template. The first response coefficients are actual amounts of positional slippage of the first template from a first input adjustment value. The flatness relational expression indicates a relationship between flatness of the first template and the first response coefficients. A shape and a size of the second template are adjusted using the second response coefficient.