Imprinting Apparatus Stage Control for Pattern Collapse Prevention
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Solution Overview
Problem
The existing imprinting apparatuses face issues with pattern collapse due to splashed droplets adhering to the cured pattern on the substrate, especially when the substrate is unloaded, which is not adequately addressed by controlling the formation order of patterns.
Innovation Solution
The imprinting apparatus includes a control unit that manages the movement of the stage to prevent regions with formed patterns from passing through the discharge port area after a predetermined time, using an airstream to inhibit droplets from adhering to the patterns, and allows regions to pass through the discharge port area only after the pattern formation is complete in adjacent regions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the substrate is moved continuously through the imprinting apparatus to increase productivity, then manufacturing efficiency is improved, but splashed droplets can adhere to formed patterns causing pattern collapse
Solution Approach 1:
The patent applies preliminary anti-action by controlling the substrate movement to prevent droplets from adhering to formed patterns in the first place. The control unit restricts the substrate from moving into the discharge port's facing portion during critical time periods, proactively preventing pattern collapse before it occurs rather than attempting to remediate it afterward.
Solution Approach 2:
The patent implements preliminary action by allowing the substrate to pass through the facing portion only after a predetermined time has elapsed since the discharging unit stopped discharging. This timing-based control ensures that any residual droplets have been cleared by the airstream before the substrate enters the vulnerable zone, preventing adhesion before it can occur.
2Manufacturing precision
If the pattern formation order is controlled to prevent collapse, then pattern integrity is improved, but the process time increases reducing productivity
Solution Approach 1:
The patent applies periodic action by implementing a rhythmic pattern in substrate movement: moving the substrate into the facing portion when safe, pausing during critical discharge periods, then moving again after the predetermined time elapsed. This periodic motion pattern balances pattern protection with continuous processing, avoiding excessive delays while preventing collapse.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively reduces the occurrence of pattern collapse by preventing droplets from adhering to the formed patterns, ensuring the integrity of the imprinted design during and after the process.
Implementation Method 1
a discharging unit (106) that has a discharge port (122b) and that discharges the imprint material from the discharge port (122b)
Implementation Method 2
After a predetermined time has elapsed since the discharging unit finally discharges the imprint material to the substrate with an airstream generated along the substrate at the facing portion that faces the discharge port
Data Source
AI summary
An imprinting apparatus 100 includes a control unit 126 that controls movement of a stage 104. During a period after a pattern is formed in a first region of regions until a pattern is formed in a second region that differs from the first region of the regions, the control unit 126 does not allow the first region to pass through a facing portion that faces a discharge ports 122b. After a predetermined time has elapsed since the discharging unit 106 finally discharges a imprint material 127 to the substrate with an airstream generated along a substrate from the facing portion at the facing portion that faces the discharge ports 122b, the control unit 126 controls movement of the stage such that the regions in which the pattern is formed are allowed to pass through the facing portion.