Imprinting Apparatus Uniform Resin Thickness via Continuous Coating
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Solution Overview
Problem
The nanoimprint lithography method struggles with achieving uniform thickness of minute patterns on large substrates due to volatilization of photocurable resin before the pressing and curing process, leading to non-uniform pattern formation.
Innovation Solution
An imprinting apparatus and method that includes a coating unit for applying a dilute photocurable resin ink, a pressing unit with an uneven imprint stamp, and a light source for curing, where the coating, pressing, and light source units move relative to the substrate in a processing direction, ensuring uniform application and curing of the resin.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the substrate is coated with photocurable resin in advance before pressing and curing, then the resin can be uniformly applied over the whole surface, but the diluent in the resin volatilizes during the waiting period, resulting in non-uniform thickness of the minute pattern
Solution Approach 1:
The coating unit applies the photocurable resin ink to the substrate in advance, preparing the material before the pressing operation. This preliminary coating action allows the resin to be positioned and distributed across the substrate surface before the stamp is pressed, ensuring proper placement while minimizing the waiting period through continuous processing.
Solution Approach 2:
The coating unit, pressing unit, and light source operate continuously in sequence without interruption. The coating unit moves to apply resin, immediately followed by the pressing unit applying the stamp, and then the light source curing the resin. This continuous operation eliminates idle time between steps, preventing diluent volatilization and ensuring uniform pattern thickness throughout the manufacturing process.
2Manufacturing precision
If the coating unit, pressing unit and light source are moved relative to the substrate in a processing direction, then the resin can be applied and cured with precise control, but the system complexity increases
Solution Approach 1:
The coating unit, pressing unit, and light source are designed as movable components that can be positioned and moved along the substrate in a processing direction. This dynamic configuration allows precise control over where and how the resin is applied and cured, enabling uniform pattern formation across the entire substrate surface while maintaining flexibility in the manufacturing process.
Solution Approach 2:
The moving mechanism serves multiple functions: it positions the coating unit for resin application, positions the pressing unit for stamp application, and positions the light source for curing. By using a single movable platform or coordinated moving system for all three units, the patent reduces overall system complexity compared to having separate fixed installations for each function, while maintaining precise control capabilities.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach ensures a uniform thickness of the minute pattern by minimizing the volatilization of the diluent between coating and pressing operations, allowing for precise control over the resin thickness and reducing manufacturing costs.
Implementation Method 1
a light source which irradiates light to the ink, which is in a pressed state, and cures the photocurable resin
Implementation Method 2
The coating unit may include an inkjet printing unit which ejects the ink onto the substrate
Data Source
AI summary
An imprinting apparatus includes: a coating unit which coats a substrate with ink including a photocurable resin in a diluent; a pressing unit which presses the ink with an imprint stamp including an uneven pattern; and a light source which irradiates light to the ink, which is in a pressed state, and cures the photocurable resin. The coating unit, the pressing unit and the light source move relative to the substrate in a processing direction. The coating unit is located ahead of the pressing unit in the processing direction.