IMT Liner Phase Transition for Interconnect Redundancy
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Solution Overview
Problem
Conventional interconnect structures lack a redundancy electrical path and cannot provide a local redundancy when the temperature increases or during electromigration events, as their liners do not undergo phase changes.
Innovation Solution
Incorporating an insulator-to/from metal transition (IMT) liner made of phase change material that is insulating at a first temperature and becomes conductive at a higher temperature, providing a redundancy path or shunting current in case of failure or electromigration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional liners are used in interconnect structures, then the structure maintains simple composition and manufacturing, but the structure lacks redundancy electrical path when temperature increases or during electromigration events
Solution Approach 1:
The liner material's electrical conductivity parameter is changed through phase transition. The IMT liner transitions from insulating phase at lower temperatures to conductive phase at higher temperatures, providing redundancy electrical path when needed without requiring complex multi-layer structures or additional components
Solution Approach 2:
The invention utilizes phase transition of the liner material from insulating to conductive state. This phase change occurs in response to temperature increase or electromigration events, automatically providing electrical redundancy when the interconnect structure experiences stress or failure conditions
2Reliability
If conventional insulating liners are used, then the liner provides electrical isolation at normal temperatures, but the liner cannot provide shunting path when the electrically conductive structure fails
Solution Approach 1:
The liner's electrical property transitions from static insulating state to dynamic conductive state based on operating conditions. The IMT liner adapts its functionality in real-time, remaining insulating during normal operation and becoming conductive when shunting is required, providing both electrical isolation and redundancy pathways
Solution Approach 2:
The IMT liner performs multiple functions: electrical isolation during normal operation, diffusion barrier, and redundancy electrical path during failure conditions. This multi-functionality eliminates the need for separate components for each function, maintaining simplicity while enhancing reliability
3Reliability
If the liner remains insulating at all temperatures, then the liner provides consistent electrical isolation, but the liner cannot enable electron flow during electromigration events
Solution Approach 1:
The electrical conductivity parameter of the liner is dynamically changed through temperature-induced phase transition. The IMT liner transitions from insulating to conductive state at a specific temperature threshold, enabling electron flow during electromigration events while maintaining isolation during normal operation
Solution Approach 2:
The liner undergoes phase transition from insulating to conductive phase at a defined temperature. This phase change enables the liner to provide shunting path and continuous electron flow during high-temperature events such as electromigration, while maintaining electrical isolation at lower operating temperatures
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The IMT liner enables a conductive shunting path when the electrically conductive structure fails or during electromigration events, ensuring continuous electron flow and enhancing the reliability of interconnect structures.
Implementation Method 1
The liner is composed of a phase change material that is insulating at a first temperature, and becomes conductive at a second temperature that is higher than the first temperature
Data Source
AI summary
An interconnect structure is provided that includes a liner located between an electrically conductive structure and an interconnect dielectric material layer. The liner is composed of a phase change material that is insulating at a first temperature, and becomes conductive at a second temperature that is higher than the first temperature. The liner that is composed of such a phase change material is referred to as an “insulator-to/from metal transition (IMT)” liner. In the present application, an entirety of, or a portion of, the IMT liner may be changed from an insulating phase to a conductive phase by increasing the temperature (i.e., heating) of the liner so as to provide a redundancy path in which electrons can flow.