In-Chamber Component Replacement Using Sensor-Guided Transfer Arms
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Solution Overview
Problem
The existing methods for replacing consumable components in processing devices require exposing the internal environment to the atmosphere, leading to increased downtime and manual handling challenges, especially with large-sized components.
Innovation Solution
A component replacement method and system that utilizes a transfer arm with a distance sensor and camera to accurately position and replace components within the processing device, allowing for automated and sealed replacement processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual replacement of consumable components is performed by opening the container to the atmosphere, then the replacement operation is simple and accessible, but the processing time increases and the internal environment is exposed
Solution Approach 1:
A replacement handler is introduced as an intermediary robotic system that performs component replacement operations within the vacuum environment. The handler includes a hand for gripping components and a moving mechanism for positioning, allowing automated replacement without atmospheric exposure while maintaining operational capability
Solution Approach 2:
Manual mechanical replacement operations are substituted with an automated robotic replacement handler. The handler uses mechanical arms and grippers controlled by a computer system to perform removal and installation of consumable components, replacing human hands and eliminating the need to open the container to atmosphere
2Ease of operation
If the container is opened to the atmosphere for component replacement, then manual access is enabled, but evacuation time is required after replacement increasing downtime
Solution Approach 1:
The replacement handler operates entirely within the vacuum (inert) environment of the processing chamber. The handler is introduced through a shaft that maintains vacuum sealing, allowing all replacement operations to occur without breaking the vacuum barrier. This eliminates the need for evacuation after replacement, maintaining continuous vacuum conditions and improving processing efficiency
3Ease of operation
If large-sized consumable components are replaced manually, then human dexterity is used, but the replacement process takes a long period of time
Solution Approach 1:
The replacement handler is equipped with sensors and control systems that enable automatic detection, gripping, and positioning of consumable components. The system can identify component locations, determine grip points, and execute replacement sequences autonomously without requiring continuous human intervention or adjustment, significantly reducing replacement time for large components
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables efficient and precise replacement of components without exposing the internal environment to the atmosphere, reducing downtime and manual handling time, and ensuring accurate alignment and installation.
Implementation Method 1
a first distance from a predetermined position in the chamber to the transfer arm is measured by a distance sensor installed at the transfer arm
Implementation Method 2
a feature disposed at a predetermined position in the chamber is captured by a camera installed at the transfer arm
Data Source
AI summary
There is provided a component replacement method comprising: a) connecting a component replacement device to a chamber of a processing device configured to process a substrate; b) inserting an end effector disposed at a tip end of a transfer arm in the component replacement device into the chamber, and measuring a first distance from a predetermined position in the chamber to the end effector using a distance sensor provided on the end effector; c) moving the end effector until a difference between the first distance and a predetermined second distance becomes less than a predetermined third distance; d) capturing a feature disposed at a predetermined position in the chamber by a camera provided on the end effector; e) moving the end effector so that the feature is captured in a predetermined position in an image captured by the camera; and f) replacing a component in the chamber using the end effector with reference to a position of the end effector in a state where the feature is captured in the predetermined position in the image captured by the camera.