In-Conveyor Electrostatic Charging for Particle Absorption Tools

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Solution Overview

Problem

Existing particle-removing tools require manual charging, necessitating the temporary opening of substrate conveyors, which introduces dust and compromises cleanliness.

Innovation Solution

A charging system with a charger integrated into the substrate conveyor's operating space electrostatically charges particle absorption tools without opening the conveyor, using a robot arm to facilitate contact with a voltage applier and a contact detector for automated charging.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If manual charging of particle-removing tool is performed, then the tool can be charged with static electricity, but the substrate conveyor must be temporarily opened which allows dust ingress

Engineering Contradiction:

Improvecleanliness maintenanceVSAvoidcharging operation

Core Design Contradiction:

ReliabilityVSEase of operation

Solution Approach 1:

The particle-removing tool charges itself automatically when the robot arm brings it into contact with the charging device. The tool does not require manual charging operations, as the robot arm autonomously performs the charging by positioning the tool against the charging electrode within the closed substrate conveyor environment.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The manual mechanical charging operation is replaced by an automated electrostatic charging system. The robot arm mechanically positions the tool, and the charging is achieved through electrical contact with the charging device, eliminating the need for manual intervention and maintaining the closed conveyor environment.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Ease of operation

If the substrate conveyor is opened for manual charging, then charging can be performed, but particles such as dust will enter the substrate conveyor

Engineering Contradiction:

Improvecharging accessibilityVSAvoiddust contamination

Core Design Contradiction:

Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The robot arm serves as an intermediary that brings the particle-removing tool into contact with the charging device without requiring opening the substrate conveyor. This intermediary mechanism enables charging operation while maintaining the closed environment that prevents dust contamination.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The charging device is pre-installed within the substrate conveyor environment. The robot arm pre-positions the tool against the charging electrode before any particle removal operation, enabling charging to occur in advance within the closed environment, thus preventing dust ingress during charging.

Inventive Principle:

Principle #10Preliminary action

3Productivity

If automated charging system is implemented, then labor requirements are reduced, but device complexity increases

Engineering Contradiction:

Improvecharging efficiencyVSAvoidsystem structure

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The robot arm performs multiple functions: it conveys substrates, holds the particle-removing tool, and positions the tool against the charging device for automated charging. This multi-functionality reduces the need for separate dedicated charging equipment, thereby limiting the increase in system complexity while maintaining high productivity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables efficient and automated charging of particle absorption tools within the conveyor system, maintaining cleanliness and reducing labor requirements while preventing dust ingress.

Implementation Method 1

a charger arranged in operating space of a robot arm that is configured to convey a substrate in an interior of a substrate conveyor, and configured to electrostatically charge the particle absorption tool so as to build up the static electric charge

Methodology Applied

Scientific EffectElectrostatic charging: Electrostatics

Implementation Method 2

particle absorption tool configured to be electrostatically charged so as to build up a static electric charge for absorbing particles

Methodology Applied

Scientific EffectElectrostatic absorption: Electrostatics

Data Source

PatentUS20250205755A1Charging system and method of controlling charging system

Publication Date: 2025.06.26 KAWASAKI JUKOGYO KK

AI summary

A charging system according to this disclosure includes a particle absorption tool configured to be electrostatically charged so as to build up a static electric charge for absorbing particles; a charger arranged in operating space of a robot arm that is configured to convey a substrate in an interior of a substrate conveyor, and configured to electrostatically charge the particle absorption tool so as to build up the static electric charge.