In-Plane Magnetic Image Sensor Chip with Etch Pit

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing magnetic image identification sensors face issues with low magnetic field sensitivity, large size, low resolution, high power consumption, and reduced output signals due to packaging materials and lead bonding, which increase the operating distance between the magnetic sensor and the image detection plane.

Innovation Solution

An in-plane magnetic image sensor chip is developed with a magnetoresistive sensor deposited on a Si substrate etch pit, connected directly to leads through pads or conducting posts, eliminating the need for packaging materials and reducing lead height, allowing direct contact with the magnetic image for enhanced signal strength.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If packaging materials and lead bonding are used to connect the magnetoresistive sensor, then the sensor can be protected and connected to external circuits, but the height of the lead or package material increases the operating distance between the magnetic sensor and the magnetic image detection plane, reducing the output signal

Engineering Contradiction:
Improvesensor protection and electrical connectionVSAvoidoutput signal strength
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The patent removes the packaging material and traditional lead bonding structure from the system. The magnetoresistive sensor is directly exposed on the chip surface with no protective package material, and electrical connections are made through pads directly on the chip surface, eliminating the intermediate lead structure that increased operating distance.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent transitions from a three-dimensional packaged structure with leads extending vertically to a two-dimensional flat structure where the sensor and leads lie on the same chip surface plane. This dimensional change allows the sensor to be in direct contact with the magnetic image detection plane, minimizing the operating distance.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If the number of turns of the coil is increased to improve magnetic field sensitivity, then the induction current signal can be enhanced, but the size of the sensor increases and power consumption increases

Engineering Contradiction:
Improvemagnetic field sensitivityVSAvoidsensor size and power consumption
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent replaces the electromagnetic induction principle (requiring coil windings) with the magnetoresistive effect. The magnetoresistive sensor detects magnetic field changes through resistance changes in response to magnetic field orientation, eliminating the need for physical coil windings and associated mechanical complexity.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the detection mechanism from electromagnetic induction to magnetoresistive effect. This parameter change allows sensitivity improvement through material and structural optimization of the magnetoresistive layer rather than increasing coil turns, thereby avoiding size and power consumption penalties.

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If a permanent magnet assembly provides a larger bias magnetic field to compensate for increased operating distance, then the output signal can be maintained, but the device complexity and size increase

Engineering Contradiction:
Improveoutput signal strengthVSAvoidpermanent magnet assembly
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent eliminates the permanent magnet assembly from the system. By removing the package material and leads that created excessive operating distance, the sensor can directly detect the magnetic image without requiring additional bias magnetic field generation components.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The magnetoresistive sensor inherently provides the necessary bias field through its own magnetic layers and structure, eliminating the need for external permanent magnet assemblies. The sensor's magnetic tunnel junction or magnetoresistive layer generates the required magnetic field for operation.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves stronger output signals and reduced power consumption by minimizing the distance between the sensor and the magnetic image, improving sensitivity and resolution while eliminating the need for packaging materials.

Implementation Method 1

a magnetoresistive sensor deposited on the bottom surface of the etch pit

Methodology Applied
Scientific EffectMagnetoresistance: Magnetoresistance

Implementation Method 2

The magnetoresistive sensor is one of Hall, AMR, GMR or TMR magnetoresistive sensors

Methodology Applied
Scientific EffectHall effect: Hall Effect

Implementation Method 3

uses the principle of electromagnetic induction to induce an induction current in the coil according to a magnetic flux change

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Data Source

PatentEP3133561B1An in-plane magnetic image sensor chip
Publication Date: 2019.12.18 MULTIDIMENSION TECH CO LTD
  • EP3133561B1 patent drawingFigure 1~3
  • EP3133561B1 patent drawingFigure 4(a)~4(g)
  • EP3133561B1 patent drawingFigure 5(a)~6

AI summary

Disclosed is a low fly height in-plane magnetic image sensor chip. This sensor chip comprises a Si substrate (1) with a pit (2) on the surface (4), a magnetoresistive sensor (5), and an insulating layer (6). The magnetoresistive sensor (5) is located on the bottom surface (3) of the pit (2) in the Si substrate (1). The insulating layer (6) is located above the magnetoresistive sensor (5). The magnetic image surface detected during operation is coplaner or parallel with the surface of the Si substrate (1) surface (3). The input and output ends of the magnetoresistive sensor (5) are connected with leads directly, or bonded with leads through pads (7(2)), or through a conducting post (8) and pads (7(2)) to form connections. And the flying height of the leads is lower than the height of the surface (4) of the Si substrate (1). This technical solution has several advantages, such as compact structure, high output signal, and direct contact with the magnetic image.