In-Situ Processing Measurement Control for Complex Object Geometry

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Solution Overview

Problem

Current processing systems for objects lack efficiency and convenience in processing, particularly in accurately measuring and processing objects with complex geometries, as they struggle to maintain optimal positional relationships between processing and measurement apparatuses, leading to suboptimal processing conditions and outcomes.

Innovation Solution

A processing system that includes a housing with a processing apparatus, a measurement apparatus, and a control apparatus, where the measurement apparatus measures the object and sets processing conditions, and the system allows for adjustable positional relationships between the processing and measurement apparatuses, enabling precise control of the processing conditions through real-time measurement feedback.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the object is moved between processing and measurement positions, then measurement can be performed, but processing interruption and time loss occur

Engineering Contradiction:
Improvemeasurement capabilityVSAvoidprocessing interruption
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent merges the processing apparatus and measurement apparatus into a single integrated system where both functions are performed on the object in its original position. The processing unit and measurement unit share the same workspace and coordinate system, eliminating the need to move the object between separate processing and measurement stations, thus preventing processing interruptions and time loss.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The system implements multi-functionality by enabling the same apparatus to perform both processing and measurement operations on the object simultaneously or sequentially without repositioning. The processing apparatus is designed with integrated measurement capabilities, allowing it to switch between processing and measurement modes while maintaining the object's position, thereby avoiding processing interruptions.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Adaptability or versatility

If separate processing and measurement apparatuses are used, then functional specialization is achieved, but positional relationship control becomes difficult

Engineering Contradiction:
Improvefunctional specializationVSAvoidpositional relationship control
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent combines separate processing and measurement apparatuses into a single integrated system with unified control. By merging the apparatuses while maintaining their specialized functions, the system achieves both functional specialization and simplified positional relationship control through shared coordinates and unified management, eliminating the complexity of coordinating multiple independent apparatuses.

Inventive Principle:
Principle #5Merging (Combining)

3Measurement precision

If the object is moved to measurement position, then measurement is enabled, but processing continuity is broken

Engineering Contradiction:
Improvemeasurement capabilityVSAvoidprocessing continuity
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent merges processing and measurement functions into a single integrated apparatus that operates on the object in its original position. This integration enables measurement capability without requiring object movement, thereby maintaining processing continuity and maximizing productivity while achieving precise measurement.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The system implements continuous useful action by allowing measurement and processing to occur sequentially or simultaneously on the object without interruption or repositioning. The integrated apparatus maintains the object's position throughout the entire workflow, ensuring continuous processing while incorporating measurement capabilities, thus maximizing productivity and eliminating idle time.

Inventive Principle:
Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This system enhances processing accuracy and efficiency by allowing for dynamic adjustment of processing conditions based on real-time measurement data, improving the precision and quality of processing operations, especially for complex objects.

Implementation Method 1

a processing apparatus that has an irradiation optical system for irradiating an object with an energy beam and that processes the object

Methodology Applied
Scientific EffectEnergy beam irradiation: Laser

Data Source

PatentUS20210339359A1Processing system and processing method
Publication Date: 2021.11.04 NIKON CORP
  • US20210339359A1 patent drawing
  • US20210339359A1 patent drawing
  • US20210339359A1 patent drawing

AI summary

A processing system has: a housing that houses an object; a processing apparatus that is disposed in the housing and that processes the object; a measurement apparatus that is disposed in the housing and that measures the object processed by the processing apparatus; and a control apparatus that sets a processing condition by using a measured result of the object.