In Situ Surface Reflectivity Measurement via Doppler Shift
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Solution Overview
Problem
Current methods cannot simultaneously measure the reflection of particles and light in situ during technological plasma processes, particularly in environments like toxic or radioactive settings, due to the need to interrupt plasma operations and the difficulty in combining particle and light reflection measurements.
Innovation Solution
A method for in situ determination of surface properties using the energy and angular distribution of hydrogen or deuterium atoms, allowing for direct measurement of spectral reflectance and polarization properties, enabling simultaneous measurement of particle and light reflection without removing the material from the plasma.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If material is removed from plasma for reflectivity measurement, then measurement accuracy is improved, but plasma operation is interrupted and productivity decreases
Solution Approach 1:
The patent replaces physical removal and mechanical measurement systems with an optical detection system that measures reflectivity remotely through the plasma environment, eliminating the need to interrupt plasma operation for measurements
Solution Approach 2:
The patent introduces optical photons as an intermediary medium to probe surface properties through the plasma without direct physical contact or interruption of the plasma process, allowing simultaneous measurement and operation
2Loss of information
If separate methods are used for particle and light reflection measurement, then measurement comprehensiveness is improved, but device complexity increases
Solution Approach 1:
The patent merges particle reflection detection and light reflection (spectral reflectance) measurement into a single integrated diagnostic system that simultaneously obtains both types of information without requiring separate measurement setups
Solution Approach 2:
The patent creates a multi-functional measurement system that can detect both particle properties (through neutral atom detection) and optical properties (through spectral reflectance measurement) using a unified diagnostic approach
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables uninterrupted monitoring of surface properties during plasma processes, improving process control and reducing risks in hazardous environments by allowing for continuous measurement of both particle and light reflection properties.
Implementation Method 1
Hydrogen or deuterium ions are accelerated towards the surface of a target by an electric field
Implementation Method 2
the ions striking the surface are neutralized. The neutral atoms leave the surface with less energy than the ion impact energy
Implementation Method 3
From the Doppler shift of the blue- and red-shifted components of the induced Balmer lines, the spectral (or specular) reflectivity of the surface can be directly measured
Implementation Method 4
From the Doppler shift of the blue- and red-shifted components of the induced Balmer lines
Data Source
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AI summary
The invention relates to a method and to a device for the in situ determination of the surface characteristics of conductive targets. The method according to the invention makes it possible to measure the energy distribution and angle distribution of the hydrogen or deuterium atoms scattered at a metal surface. From the Doppler shift of the blue- and red-shifted components of the induced Balmer lines, the spectral or specular reflectivity of the surface can be directly measured. Furthermore, the mass of the atoms at the surface of the target can be determined.