In-Tier Access Line Drivers for Denser 3D Memory Arrays

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Solution Overview

Problem

Existing three-dimensional (3D) DRAM devices face challenges in increasing memory cell density and optimizing power usage due to limitations in the design and integration of access line drivers, particularly in the arrangement of word lines and sub-access line drivers.

Innovation Solution

The integration of sub-access line drivers (SWDs) within the memory array tiers, utilizing a two-transistor structure comprising NMOS transistors, and a staircase contact arrangement that reduces the physical footprint and enhances signal control, allowing for increased memory cell density and improved power efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If sub-access line drivers are integrated within memory array tiers using a two-transistor structure, then memory cell density increases by up to 16-20%, but device complexity increases due to additional transistor integration

Engineering Contradiction:
Improvememory cell densityVSAvoiddevice complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent merges the sub-access line driver functionality directly into the memory array tier structure by integrating two-transistor units that combine the driver circuit with the access line control. This consolidation allows the driver to be embedded within the array itself rather than being a separate external component, thereby increasing memory cell density while managing the complexity through functional integration.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The driver circuit is segmented into discrete two-transistor units that can be independently integrated into each memory tier. Each unit consists of specific transistor configurations (including NMOS and PMOS transistors) that work together to control access lines, allowing modular integration that increases density without proportionally increasing overall device complexity.

Inventive Principle:
Principle #1Segmentation

2Loss of energy

If sub-access line drivers are embedded in memory array tiers, then power consumption is reduced by minimizing gate-induced drain leakage, but manufacturing complexity increases due to additional fabrication masks

Engineering Contradiction:
Improvepower consumptionVSAvoidease of manufacture
Core Design Contradiction:
Loss of energyVSEase of manufacture

Solution Approach 1:

The patent employs parameter changes in transistor configuration and placement to optimize power characteristics. By carefully selecting transistor types (NMOS and PMOS) and their specific arrangements within the two-transistor units, the design minimizes gate-induced drain leakage current, thereby reducing power consumption while maintaining manufacturability through controlled parameter optimization.

Inventive Principle:
Principle #35Parameter changes

3Area of stationary object

If a staircase contact arrangement is used for sub-access line drivers, then physical footprint is reduced and signal control is enhanced, but fabrication complexity increases due to additional masks

Engineering Contradiction:
Improvephysical footprintVSAvoidease of manufacture
Core Design Contradiction:
Area of stationary objectVSEase of manufacture

Solution Approach 1:

The staircase contact arrangement utilizes multi-dimensional spatial planning by stacking contacts vertically across different tiers while maintaining horizontal connectivity. This three-dimensional contact structure reduces the planar footprint required for driver integration while preserving signal control capabilities, effectively using vertical space to compensate for the added fabrication complexity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS20260040536A1Memory device having in-tier access line drivers
Publication Date: 2026.02.05 MICRON TECHNOLOGY INC
  • US20260040536A1 patent drawing
  • US20260040536A1 patent drawing
  • US20260040536A1 patent drawing

AI summary

A variety of applications can include an apparatus having a three-dimensional (3D) memory device with sub-access line drivers to access lines embedded in a memory array of the 3D memory device. A sub-access line driver to an access line to a tier of memory cells of the memory array can include two transistors coupled to each other and the access line. A first transistor of the two transistors can be coupled at one end of the access line and the second transistor of the two transistors can be coupled at the other end of the access.