Inactive Gas Introducing Facility with Progressive Feed Rate Control
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Solution Overview
Problem
Existing inactive gas introducing facilities cause substrate vibration and particle floating due to sudden changes in gas pressure during nitrogen gas introduction, leading to substrate deterioration and particle adhesion.
Innovation Solution
An inactive gas introducing facility with a controller that progressively increases the gas feed rate to a target rate, smoothing the pressure change and preventing sudden gas flow, thereby minimizing substrate vibration and particle floating.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If inactive gas is fed at one time at the target feed rate, then the container is quickly filled with inactive gas, but sharp pressure changes occur causing substrate vibration and particle floating
Solution Approach 1:
The patent applies dynamics by making the feed rate variable rather than constant. The introducing device progressively increases the feed rate from a low initial rate to the target feed rate over time, creating a dynamic feeding process that adapts to the container's pressure conditions and prevents sudden pressure changes that cause substrate vibration and particle floating.
Solution Approach 2:
The patent changes the parameter of feed rate from a fixed target value to a time-varying parameter that progresses from low to high. This parameter change strategy allows the system to achieve quick filling eventually while avoiding the harmful effects of instantaneous high-rate gas introduction, thus resolving the contradiction between productivity and harmful factors.
2Object-affected harmful factors
If the feed rate is increased progressively to the target feed rate, then sharp pressure changes are restricted, but the gas filling time is extended
Solution Approach 1:
The patent implements periodic action through staged feed rate progression. Instead of a continuous gradual increase, the feed rate is increased in discrete stages or periods, allowing the system to balance between progressive pressure stabilization and reasonable filling time. This periodic approach mitigates the time penalty while maintaining pressure stability.
3Productivity
If nitrogen gas is fed at a pressure slightly higher than atmospheric pressure, then gas introduction is effective, but substrate vibration occurs at the start of introduction
Solution Approach 1:
The patent applies preliminary action by first introducing gas at a low feed rate to establish a stable pressure baseline before increasing to the target feed rate. This preliminary low-rate introduction prepares the system for subsequent high-rate filling without causing immediate substrate vibration, effectively separating the stabilization phase from the efficient filling phase.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The progressive feed rate control effectively restricts sharp pressure changes and fluidization of gas inside the container, preventing substrate vibration and particle adhesion, thus maintaining the substrate's proper state and reducing gas consumption.
Implementation Method 1
the feed rate is increased progressively to a target feed rate... restricts sharp pressure changes... smoothing the pressure change
Data Source
AI summary
An inactive gas introducing facility includes an introducing device disposed in a support portion supporting a container accommodating a substrate and configured for introducing inactive gas to the inside of the container through a gas feed opening of the container with discharging gas present inside the container to the outside through a gas discharge opening of the container and a controller for controlling operation of the introducing device. The introducing device is capable of varying the feed rate of the inactive gas. The controller is configured to control the operation of the introducing device such that in the feeding of the inactive gas to the container supported to the support portion, the feed rate is increased progressively to a target feed rate.