Inclined Carrier Transfer for Sputtering Stability
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate transferring apparatuses in sputtering equipment face challenges due to the large size and volume of carriers, leading to increased processing time, instability during transfer, and potential uneven layers due to vertical substrate orientation, which affects the efficiency and quality of thin film deposition in manufacturing processes like LCD production.
Innovation Solution
An inclined carrier transferring apparatus is introduced, featuring a transferable supporter with angled rollers at the bottom and a non-contacting magnetic guiding portion with strategically positioned magnetic ends to stabilize and secure the carrier during transfer, minimizing lateral movement and ensuring even substrate loading.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the substrate is transferred in a vertical orientation using rollers at the lower end of the carrier, then the carrier transfer mechanism is simple, but the central portion of the substrate protrudes outward causing uneven layers
Solution Approach 1:
The patent changes the transfer orientation from vertical to inclined (at a predetermined angle). This dimensional change in the transfer angle prevents the substrate central portion from protruding outward, thereby ensuring even layer deposition while maintaining a relatively simple roller-based transfer mechanism.
2Stability of the object's composition
If the lower support of the carrier is made heavy to improve stability, then the carrier stability improves, but the device complexity and weight increase
Solution Approach 1:
The patent introduces a guiding portion positioned above the carrier that provides lateral guidance during transfer. This spatial arrangement (positioning the guide above rather than below) provides stability without requiring the lower support to be heavy, thus avoiding increased device complexity and weight.
3Reliability
If carriers are transported one at a time, then the substrate is protected during transfer, but the processing time increases and work efficiency decreases
Solution Approach 1:
The inclined carrier transferring apparatus with its non-contacting magnetic guiding portion creates a stable transfer environment that enables safe simultaneous transport of multiple carriers. The magnetic guide ensures lateral stability for each carrier while the inclined orientation prevents substrate protrusion, allowing parallel processing without compromising substrate protection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The inclined carrier transferring apparatus reduces substrate instability and lateral movement, enhancing the evenness of deposited layers and improving processing efficiency by securely transferring substrates with minimal protrusion or buckling, thus optimizing the sputtering process.
Implementation Method 1
a guiding portion for supporting a top of the carrier in a non contacting manner
Data Source
AI summary
An inclined carrier transferring apparatus for use inline sputtering equipment. The inclined carrier transferring apparatus includes rollers and a guiding portion. The rollers transfer and support the bottom of a carrier. The guiding portion is installed diagonally with respect to the rollers, to support the top of the carrier in a non-contact manner.