Inclined Cleaning Surface for Substrate Processing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In existing self-cleaning devices for substrate processing apparatuses, liquid accumulation on the cleaning member can lead to inadequate cleaning of the cleaning tool, resulting in reduced substrate cleaning performance.
Innovation Solution
The self-cleaning device incorporates a cleaning member with a surface inclined relative to the horizontal plane, allowing liquids to naturally drain by gravity, and an injection unit to inject liquids toward the cleaning member or tool, preventing accumulation and ensuring efficient cleaning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a horizontal cleaning surface is used, then the cleaning tool can be pressed firmly against the cleaning member, but liquid accumulates on the cleaning member reducing cleaning effectiveness
Solution Approach 1:
The cleaning surface is designed with an inclination angle θ (0° < θ ≤ 45°) relative to the horizontal plane, creating an asymmetric geometry that prevents liquid accumulation while maintaining cleaning tool contact. The inclined surface causes liquids to naturally drain downward due to gravity, eliminating the harmful accumulation effect while the cleaning tool is pressed against the upper portion of the inclined surface.
Solution Approach 2:
The cleaning surface transitions from a two-dimensional horizontal plane to a three-dimensional inclined plane. This dimensional change introduces a gravitational component that drives liquid drainage along the slope, adding a liquid removal function to the cleaning surface without compromising its primary cleaning function.
2Object-affected harmful factors
If the cleaning surface is inclined, then liquid accumulation is suppressed, but the cleaning tool may not be pressed firmly enough against the cleaning member
Solution Approach 1:
The inclined cleaning surface is designed with specific local characteristics: the inclination angle θ is constrained to (0° < θ ≤ 45°) to balance liquid drainage and pressing force. The cleaning tool presses against the upper portion of the inclined surface where the normal force component is maximized, ensuring sufficient cleaning pressure while the lower portion facilitates liquid drainage.
3Ease of operation
If liquid accumulates on the cleaning member, then the injection unit can effectively apply cleaning liquid, but the cleaning tool is not thoroughly cleaned reducing substrate cleaning performance
Solution Approach 1:
The inclined cleaning surface converts the potential harm of liquid accumulation into a beneficial liquid drainage mechanism. Liquids injected by the injection unit naturally flow downward along the inclined surface, continuously rinsing the cleaning tool and preventing dirt re-deposition, thereby enhancing rather than reducing cleaning performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively suppresses liquid accumulation on the cleaning surface, maintaining the cleaning tool's effectiveness and extending its usage period by ensuring thorough cleaning of the substrate.
Implementation Method 1
the cleaning surface is inclined with respect to a horizontal plane... allowing liquids to naturally drain by gravity
Data Source
AI summary
A self-cleaning device of the present disclosure includes: a cleaning member configured to clean a cleaning tool that cleans a substrate; and an injection unit configured to inject a liquid toward the cleaning member or the cleaning tool. The cleaning member has a cleaning surface that cleans the cleaning tool when the cleaning tool is pressed thereagainst, and the cleaning surface is inclined with respect to a horizontal plane.