Inclined MR Magnetic Sensor Layout for Stable Bias Fields
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Solution Overview
Problem
Magnetic sensors with magnetoresistive elements on inclined surfaces face variations in bias magnetic field strength due to inconsistent positioning and angle of magnetic field generators, leading to inconsistent sensor characteristics.
Innovation Solution
A magnetic sensor design with a substrate having inclined surfaces and magnetic field generators disposed on these surfaces to stabilize the bias magnetic field applied to magnetoresistive elements, ensuring consistent field strength across the sensor.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If magnetoresistive elements are disposed on inclined surfaces to detect magnetic fields with perpendicular components, then the sensor can detect magnetic fields containing components in the direction perpendicular to the substrate surface, but the position and inclination angle of the end portion of the magnetic field generator vary, causing variation in the strength of the bias magnetic field
Solution Approach 1:
The magnetic field generator is divided into a first magnetic field generator and a second magnetic field generator, with each generator serving specific magnetoresistive elements on different inclined surfaces. This segmentation allows independent optimization of each generator's position and orientation to compensate for variations in the inclined surface geometry.
Solution Approach 2:
Each magnetic field generator is specifically positioned and oriented to provide a bias magnetic field with consistent strength to the corresponding magnetoresistive elements on its respective inclined surface. The local quality of the magnetic field generation is optimized for each specific location and inclination angle.
2Adaptability or versatility
If the magnetic field generator is formed on an inclined surface, then the sensor can detect magnetic fields with perpendicular components, but the strength of the bias magnetic field varies due to position and angle variations
Solution Approach 1:
The magnetic field generator is divided into a first magnetic field generator and a second magnetic field generator, with each generator serving specific magnetoresistive elements on different inclined surfaces. This segmentation allows independent optimization of each generator's position and orientation to compensate for variations in the inclined surface geometry.
Solution Approach 2:
Each magnetic field generator is specifically positioned and oriented to provide a bias magnetic field with consistent strength to the corresponding magnetoresistive elements on its respective inclined surface. The local quality of the magnetic field generation is optimized for each specific location and inclination angle.
3Adaptability or versatility
If magnetoresistive elements are disposed on inclined surfaces, then the sensor can detect magnetic fields with perpendicular components, but the characteristics of the magnetic sensor vary due to inconsistent bias magnetic field strength
Solution Approach 1:
The magnetic field generator is divided into a first magnetic field generator and a second magnetic field generator, with each generator serving specific magnetoresistive elements on different inclined surfaces. This segmentation allows independent optimization of each generator's position and orientation to compensate for variations in the inclined surface geometry.
Solution Approach 2:
Each magnetic field generator is specifically positioned and oriented to provide a bias magnetic field with consistent strength to the corresponding magnetoresistive elements on its respective inclined surface. The local quality of the magnetic field generation is optimized for each specific location and inclination angle.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design stabilizes the bias magnetic field applied to magnetoresistive elements, reducing variations and enhancing the consistency and reliability of magnetic sensor performance.
Implementation Method 1
a magnetic field generator configured to apply a bias magnetic field to the magnetoresistive element
Implementation Method 2
a magnetization pinned layer whose magnetization direction is fixed, a free layer whose magnetization direction is variable depending on the direction of an applied magnetic field
Data Source
AI summary
A magnetic sensor includes: a substrate having a top surface; an insulating layer having a top surface including a first inclined surface and a second inclined surface that are inclined relative to the top surface of the substrate and oriented in directions different from each other; a first MR element disposed above the first inclined surface; a second MR element disposed above the second inclined surface; and two magnetic field generators that are disposed from the first inclined surface to the second inclined surface, with the first MR element and the second MR element interposed therebetween, the two magnetic field generators each being configured to apply a bias magnetic field to the first MR element and the second MR element.