Inclined Magnetoresistive Sensor Geometry for Sensitivity Retention
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Solution Overview
Problem
Magnetic sensors with magnetoresistive elements on inclined surfaces face issues with reduced sensitivity due to diminished shape magnetic anisotropy of the free layer, which is exacerbated by a tapered side surface shape.
Innovation Solution
The magnetic sensor design includes a magnetoresistive element on an inclined surface with a specific side surface configuration, where at least part of the first side surface is closer to a virtual plane intersecting with a corner, maintaining shape magnetic anisotropy and enhancing sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the side surface of the magnetoresistive element has a tapered shape, then the shape magnetic anisotropy of the free layer is reduced, but the sensitivity of the magnetoresistive element is lowered
Solution Approach 1:
The magnetoresistive element is designed with an asymmetric side surface configuration where the first side surface is closer to the reference plane than the second side surface. This asymmetric geometry creates a specific magnetic field distribution that enhances shape magnetic anisotropy in the free layer, thereby improving sensitivity without the need for a tapered shape.
Solution Approach 2:
The invention transitions from a conventional tapered side surface (one-dimensional slope) to a multi-faceted side surface configuration with distinct first and second side surfaces at different positions relative to the reference plane. This dimensional change allows independent optimization of magnetic anisotropy and sensitivity by controlling the spatial relationship between side surfaces and the reference plane.
2Reliability
If the width of the magnetoresistive element is made narrower, then the shape magnetic anisotropy of the free layer is increased, but the sensitivity of the magnetoresistive element is lowered
Solution Approach 1:
Instead of uniformly narrowing the entire magnetoresistive element, the invention applies local geometric modification specifically to the side surfaces. The first side surface is positioned closer to the reference plane while the second side surface is positioned further away, creating localized geometric features that enhance shape magnetic anisotropy without excessively reducing the overall element width and compromising sensitivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration suppresses the occurrence of sensitivity loss issues, maintaining or improving the magnetic sensor's performance on inclined surfaces.
Implementation Method 1
a free layer may have a shape magnetic anisotropy
Implementation Method 2
magnetoresistive element disposed on an inclined surface
Data Source
AI summary
A magnetic sensor includes a substrate having a reference plane, a support member having an inclined surface, and a magnetoresistive element disposed on the inclined surface. The magnetoresistive element has a bottom surface, a top surface, and a first side surface and a second side surface connecting the bottom surface and the top surface. The first side surface is, as compared to the second side surface, located in front in a first direction that is along the inclined surface and that gets close to the reference plane. At least a part of the first side surface is, as compared to a first virtual plane, located close to the second side surface, and the first virtual plane intersects with a first corner present at a position at where the top surface and the first side surface intersect and is perpendicular to the reference plane.