Inclined Optical Waveguide Manufacturing via Oblique Photopolymerization
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Solution Overview
Problem
Existing methods for producing optical waveguides struggle with efficiently connecting sloped optical signals to waveguides, particularly in silicon photonics, and face challenges with high equipment costs and low mass productivity due to the difficulty in shaping through-holes obliquely and using pulsed lasers for optical path conversion components.
Innovation Solution
A method involving an anti-reflective coating formed from a polymerizable composition containing a reactive silicone compound and an ultraviolet absorber, applied on a substrate, which allows for the formation of optical waveguides inclined at desired angles by exposing the photosensitive resin composition to light from a non-vertical direction, enabling efficient transmission of inclined optical signals.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a microlens is used to collect optical signals for optical coupling at 90 degrees, then optical coupling efficiency is improved, but optical signals with inclined output angles cannot be efficiently transmitted
Solution Approach 1:
The patent changes the inclination angle parameter of the optical waveguide to match the output angle of the silicon diffraction grating. By forming the optical waveguide at a specific inclined angle rather than vertically, the system achieves both efficient optical coupling and compatibility with inclined optical signals from silicon photonics devices.
2Reliability
If an optical waveguide is laid out in an L-shape in a through-hole using a pulsed laser to weld, then optical path conversion is achieved, but equipment cost increases and mass productivity decreases
Solution Approach 1:
The patent replaces the mechanical/pulsed laser welding process with a photochemical process. The optical waveguide is formed by photopolymerization of a photosensitive resin composition during exposure, eliminating the need for expensive pulsed laser equipment and enabling high-speed, high-volume production through standard photolithography processes.
Solution Approach 2:
The patent utilizes the phase transition of the photosensitive resin composition from liquid to solid through photopolymerization. During exposure, the resin cures and forms the optical waveguide structure in place, enabling precise shaping and integration without mechanical welding or L-shaped routing.
3Reliability
If a through-hole is shaped obliquely to connect optical signals, then optical coupling efficiency is improved, but the through-hole is difficult to shape and equipment cost increases
Solution Approach 1:
The patent changes the manufacturing approach by forming the optical waveguide with a specific inclination angle through controlled photopolymerization during oblique exposure. This avoids the difficulty of shaping oblique through-holes by using a photosensitive material that can be selectively cured at angles, achieving the desired oblique connection through material property control rather than mechanical shaping.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for the production of optical waveguides with low signal loss, high surface packaging density, and high-speed operations while maintaining high productivity, effectively connecting inclined optical signals from silicon diffraction gratings to waveguides.
Implementation Method 1
a method in which a photosensitive resin composition is exposed to a light ray entering from a direction non-vertical to a surface of a substrate, thereby forming an optical waveguide having a desired angle inclined to the surface of the substrate
Implementation Method 2
providing an anti-reflective coating on the substrate, wherein the anti-reflective coating is a film formed from a polymerizable composition
Data Source
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Figure 3~4
AI summary
There is a method for producing an optical waveguide composing an optical path conversion component having an extremely low signal loss, allowing a high surface packaging density and high speed operation, and allowing high productivity. A method for producing an optical waveguide that propagates light from a surface of a support to an oblique direction not vertical to the surface, the method for producing an optical waveguide comprising the steps of: (1) providing an anti-reflective coating on the support; (2) placing a photosensitive resin composition on the anti-reflective coating, and exposing the photosensitive resin composition to a light ray entering from a direction non-vertical to the surface of the support through a photomask for curing the composition; and (3) removing the unexposed photosensitive resin composition by development; and an optical waveguide obtained by the method.