Arc Deposition Layout with Independent Anodes for Multi-Racetrack Control
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Solution Overview
Problem
Current arc deposition systems are limited by the use of single racetrack cathodic arc sources, which restricts the potential for increased deposition rates and efficient utilization of multiple racetracks.
Innovation Solution
An arc deposition system with multiple anodes surrounding a central cathode target, where each anode is positively biased to induce independent racetrack erosion profiles, guided by magnetic components within the cathode target, allowing for separate and controlled current paths for each racetrack.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple anodes are used to generate multiple racetracks, then deposition rate increases, but device complexity increases
Solution Approach 1:
The system divides the single arc source into multiple independent racetracks by introducing multiple anodes (at least two) surrounding the central cathode target. Each anode independently induces its own racetrack erosion profile on the cathode target, allowing multiple deposition streams to operate simultaneously and increase overall deposition rate.
Solution Approach 2:
The patent transitions from a single-racetrack configuration to a multi-racetrack configuration by adding spatial dimensionality. Multiple anodes are positioned at different angular positions around the cathode target, creating multiple racetracks that are spatially separated but operate within the same vacuum chamber, thereby increasing productivity without proportionally increasing chamber size.
2Productivity
If multiple racetracks are generated, then deposition efficiency improves, but current path control becomes more difficult
Solution Approach 1:
Each anode is configured with specific local properties (positive bias voltage, angular position, distance from cathode) that enable it to independently control its associated racetrack. This local differentiation allows each current path to be optimized and controlled separately, maintaining ease of control despite having multiple racetracks.
Solution Approach 2:
The system controls multiple racetracks by adjusting key parameters including the positive bias voltage applied to each anode, the angular positioning of anodes around the cathode, and the magnetic field configuration. By independently tuning these parameters for each anode-racetrack combination, the system achieves efficient multi-racetrack operation with controllable current paths.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables the effective formation and management of multiple racetrack erosion profiles, enhancing deposition rates and efficiency by separating current paths and allowing for independent control of each racetrack, which can be expanded to any number of profiles.
Implementation Method 1
At least two magnetic components are positioned within the central cathode target. The at least two magnetic components guide an associated arc that forms the associated racetrack erosion profile
Implementation Method 2
Each anode is positively biased with respect to the central cathode target such that each anode independently induces an associated racetrack erosion profile on the central cathode target
Data Source
Figure 1A
Figure 1B
AI summary
An arc deposition system includes a coating chamber and a central cathode target disposed within the coating chamber. At least two anodes surround the central cathode target. Each anode is positively biased with respect to the central cathode target such that each anode independently induces an associated racetrack erosion profile on the central cathode target. At least two magnetic components are located within the central cathode target. The magnetic components guide an associated arc that forms its associated racetrack erosion profile. Characteristically, each anode of the at least two anodes has an associated magnetic component.