Independent Arm Robot Drive for Substrate Exchange
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Solution Overview
Problem
Conventional substrate handling robots in semiconductor manufacturing and flat panel display processing face inefficiencies in substrate exchange operations due to the need for multiple moves and lack of independent rotational and vertical motion in robots with multiple end-effectors, which limits throughput.
Innovation Solution
A substrate handling robot drive system with independently movable and rotatable arms, featuring co-axial shafts and motor-driven Z-axis systems, allows for independent rotational and vertical motion of each arm, enabling simultaneous and independent operation of multiple arms to enhance substrate exchange efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If a robot with two or more end-effectors is used to reduce substrate exchange moves, then the number of moves is reduced, but the arms are coupled and cannot perform independent rotational and vertical moves
Solution Approach 1:
The robot system is divided into multiple independent arm assemblies, each with its own drive unit. Each arm assembly includes a housing movable with respect to the chassis, shafts for rotational motion, and Z-axis drives for vertical motion. This segmentation allows each arm to operate independently while maintaining the multi-end effector configuration that reduces substrate exchange moves.
2Productivity
If conventional coupled arms are used, then the structure is simpler, but the arms cannot perform simultaneous independent operations
Solution Approach 1:
The drive system is segmented into multiple independent drive units, each controlling a separate arm assembly. Each drive unit contains its own motor subsystems for rotational motion and Z-axis drives for vertical motion, eliminating the need for coupled arm mechanisms and enabling simultaneous independent operations.
Solution Approach 2:
Each arm assembly is designed with universal functionality to perform both rotational moves and vertical Z-axis moves independently. The standardized drive unit design can be replicated across multiple arms, providing multi-functionality while maintaining structural consistency and managing complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design significantly reduces the number of moves required for substrate exchange, thereby improving throughput and efficiency in substrate handling processes.
Implementation Method 1
a first motor subsystem driving the first shaft. A second motor subsystem is driving the second shaft
Implementation Method 2
The Z-axis drive for the first housing may include a first motor driven screw in the chassis and a ball assembly attached to the first housing and driven by the first motor driven screw
Implementation Method 3
a ball assembly attached to the first housing and driven by the first motor driven screw
Data Source
AI summary
A substrate handling robot drive includes a drive chassis for one or more robot arms. A first housing is movable with respect to the chassis and includes at least a first shaft and a first motor subsystem for driving the first shaft. A Z-axis drives the first housing. A second housing is movable with respect to the chassis and includes at least a second shaft and a second motor subsystem for driving the second shaft. A Z-axis drive for the second housing is independently movable with respect to the Z-axis drive for the first housing.