Refractive Index Profiling with Pinhole Diffraction Filtering

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Solution Overview

Problem

Existing methods for determining the refractive index profile of cylindrical optical objects are prone to errors due to diffraction effects caused by microlayer variations, leading to inaccurate measurements and noise in deflection data.

Innovation Solution

A method and system that utilize a pinhole aperture to selectively measure deflection functions with and without its presence in the optical beam path, merging these measurements to create a composite deflection function for accurate refractive index profile calculation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional deflection measurement is performed on cylindrical optical objects, then the refractive index profile can be determined, but diffraction effects from microlayer variations cause measurement errors and noise

Engineering Contradiction:
Improverefractive index profile measurement accuracyVSAvoiddiffraction effects from microlayer variations
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The measurement process is segmented into two distinct parts: one measurement with the pinhole aperture in place to filter diffraction, and one measurement without the pinhole to capture complete deflection information. These segmented measurements are then combined to achieve both noise reduction and complete data coverage.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The pinhole aperture serves as an intermediary element that selectively filters diffracted light while allowing direct light to pass through. By positioning the pinhole at a specific location in the optical path, it acts as a spatial filter that removes harmful diffraction effects from microlayer variations.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If a pinhole aperture is used to filter diffraction effects, then measurement accuracy improves, but the device complexity increases

Engineering Contradiction:
Improvedeflection function measurement accuracyVSAvoidoptical measurement system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The pinhole aperture is made movable rather than fixed, allowing it to be dynamically positioned in and out of the optical path. This dynamic configuration enables the system to switch between filtered and unfiltered measurements without requiring separate fixed installations, thereby managing complexity.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The movable pinhole aperture serves multiple functions: it acts as a spatial filter when in position, and its removal allows complete light transmission. This single component provides both diffraction filtering capability and complete measurement capability, reducing the need for multiple separate systems.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Measurement precision

If measurements are taken at multiple scanning locations to reconstruct the refractive index profile, then the RIP determination becomes more accurate, but the measurement time increases

Engineering Contradiction:
Improverefractive index profile reconstruction accuracyVSAvoidmeasurement time for multiple scanning locations
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The pinhole aperture is pre-positioned in the optical path before measurements begin, and the measurement sequence is pre-planned to alternate between pinhole-in and pinhole-out configurations at different scanning locations. This preliminary setup and sequencing reduces measurement time by avoiding repeated positioning adjustments during the scanning process.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method significantly reduces the impact of material effects on refractive index determination by enhancing diffraction separation, resulting in more accurate and reproducible refractive index profile reconstruction.

Implementation Method 1

Microlayer variations in the resulting material lead to significant diffraction when measuring the deflection function

Methodology Applied
Scientific EffectDiffraction: Diffraction

Implementation Method 2

a pinhole aperture being located in a path of the one or more optical beams upstream of the cylindrical surface

Methodology Applied
Scientific EffectSpatial filtering: Filter (optical)

Implementation Method 3

The optical object will deflect the beam(s), and the deflection at each of the scanning locations can be measured to define a deflection angle distribution

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentUS12560537B2Ultra low-na refractive index profiling system and method for filtering out severely disturbing diffraction effects
Publication Date: 2026.02.24 HERAEUS QUARTZ NORTH AMERICA LLC
  • US12560537B2 patent drawing
  • US12560537B2 patent drawing
  • US12560537B2 patent drawing

AI summary

A method for determining a refractive index profile of an optical object having a cylindrical surface includes: (a) scanning the surface at a first plurality of scanning locations with a pinhole aperture in a path of one or more optical beams; (b) measuring a first deflection function based detecting the optical beams after deflection by the optical object for each of the first plurality of scanning locations; (c) scanning the surface at a second plurality of scanning locations where the path of the optical beams is free of the pinhole aperture; (d) measuring a second deflection function based on detecting the optical beams after deflection by the optical object for each of the second plurality of scanning locations; (e) merging at least portions of the first and second deflection functions to obtain a composite deflection function; and (f) calculating the refractive index profile using the composite deflection function.