Indexer Buffer Transport for Compact Substrate Treatment Layouts
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Solution Overview
Problem
Current substrate treating apparatuses have a large interface block due to the presence of multiple substrate transport mechanisms, which increases the footprint and complexity, making them less compact.
Innovation Solution
A substrate treating apparatus with an indexer block, a first treating block, and a second treating block, where the indexer block includes a carrier platform and a substrate buffer with an indexer mechanism, and the first treating block has an interface layer and a treatment layer, while the second treating block has multiple treatment layers arranged in an up-down direction, allowing for compact configuration and reduced footprint.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple substrate transport mechanisms are provided in the interface block to transport substrates between treatment layers, then substrate transportation functionality is improved, but the interface block becomes large and complex
Solution Approach 1:
The patent merges multiple substrate transport mechanisms into a single integrated transport mechanism that serves both the first and second treatment layers. This single mechanism transports substrates between the interface layer and both treatment layers, eliminating the need for separate transport mechanisms for each layer and thereby reducing the interface block size while maintaining full transportation functionality.
Solution Approach 2:
The single substrate transport mechanism is designed to perform multiple functions: it transports substrates to the first treatment layer, to the second treatment layer, and facilitates substrate movement between these layers. This multi-functional design replaces what would traditionally require multiple specialized transport mechanisms, reducing overall system complexity.
2Adaptability or versatility
If multiple substrate transport mechanisms are provided in the interface block, then substrate transportation capability is improved, but the footprint of the apparatus increases
Solution Approach 1:
By combining multiple transport functions into a single transport mechanism, the horizontal space required for multiple separate mechanisms is eliminated. The single mechanism is positioned to efficiently serve both treatment layers, thereby reducing the overall footprint of the apparatus while maintaining the capability to transport substrates to and from both layers.
Solution Approach 2:
The patent arranges the first and second treatment layers in an up-down direction (vertical dimension) rather than side-by-side in the horizontal plane. The single transport mechanism accesses these vertically stacked layers, thereby reducing the horizontal footprint of the apparatus while preserving full substrate transportation capability to both layers.
3Adaptability or versatility
If the interface block includes multiple transport mechanisms moving upward/downward between treatment layers, then substrate distribution between layers is improved, but the interface block becomes large
Solution Approach 1:
The patent combines the substrate distribution function to multiple layers into a single transport mechanism that is capable of serving both the first and second treatment layers. This single mechanism distributes substrates to different layers as needed, eliminating the need for separate upward/downward moving mechanisms for each layer and thereby reducing the interface block size while maintaining distribution capability.
Solution Approach 2:
The single transport mechanism is designed with universal functionality to distribute substrates to both the first and second treatment layers, and to retrieve substrates from both layers. This multi-functional design replaces what would traditionally require multiple specialized mechanisms, reducing interface block complexity and size.
Data Source
AI summary
Disclosed are a substrate treating apparatus and a substrate transporting method. A first treating block includes a developing-treatment layer and an interface layer arranged in an up-down direction. Accordingly, the interface layer is couplable with the indexer block. Moreover, a substrate transport mechanism of the indexer block transports a substrate from one of buffer units located at a predetermined height position in a substrate buffer to another of the buffer units located at a different height position in the substrate buffer. Accordingly, the interface layer is accessible to the buffer unit located at a height position corresponding to the interface layer. Thus, the interface layer can be made compact. Moreover, the interface layer is located in the upper part or the lower part of the developing-treatment layer, leading to reduction in footprint.