Indexer Robot Guide Rail Layout for Direct Substrate Transfer
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Solution Overview
Problem
The existing substrate treating apparatuses face reduced transportation efficiency due to the need for the indexer robot to move horizontally to face the reversing path unit, which is hindered by the guide rail, preventing efficient delivery of substrates to and from the reversing path block.
Innovation Solution
The indexer robot is designed with a guide rail positioned non-overlappingly with the reversing path block's mount position, allowing the articulated arm to deliver substrates efficiently between the carrier platforms and the reversing path block, and the guide rail is shifted laterally to avoid obstruction, enabling enhanced delivery efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the indexer robot is positioned at the center portion to access carrier platforms, then the robot can service all carriers, but the guide rail obstructs delivery to the reversing path block
Solution Approach 1:
The patent repositions the guide rail from a central location to a lateral position along the width direction of the indexer block. This spatial reconfiguration in another dimension allows the indexer robot to access carrier platforms while the guide rail no longer obstructs the delivery path to the reversing path block, resolving the conflict between versatility and ease of operation
2Ease of operation
If the indexer robot moves horizontally to face the reversing path unit, then substrates can be delivered, but transportation time increases
Solution Approach 1:
The guide rail is pre-positioned in a fixed lateral location that is horizontally aligned with the reversing path block's substrate mount position. This preliminary positioning eliminates the need for the indexer robot to perform horizontal movement during substrate delivery, allowing direct transfer and reducing transportation time
3Ease of operation
If the guide rail is positioned to allow horizontal movement, then the robot can reposition, but it prevents direct access to the reversing path block
Solution Approach 1:
The guide rail function is extracted from the central operational area and repositioned to the lateral edge of the indexer block. This separation allows the indexer robot to maintain repositioning capability through vertical movement along the guide rail while eliminating obstruction to the reversing path block, thereby improving delivery efficiency
Data Source
AI summary
Disclosed is a substrate treating apparatus for performing a cleaning treatment on substrates. The apparatus includes an indexer block with an indexer robot, a treating block including a cleaning unit, and a path block disposed between the indexer block and the treating block. The indexer robot includes a guide rail, a base, an articulated arm, and a hand. The guide rail is positioned so as not to overlap a mount position of a substrate in the path block.