Inductance Shielding Structure for Semiconductor EMI Stability
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Solution Overview
Problem
Inductance structures in semiconductor devices are not adequately shielded from external electromagnetic fields, leading to induced charges that degrade their performance in noise reduction and current stabilization.
Innovation Solution
A shielding structure is arranged around the inductance structure, partially or fully, to shield it from external electromagnetic fields, improving its performance in noise reduction and current stabilization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If no shielding structure is provided for the inductance structure, then the device complexity is reduced, but the inductance structure is exposed to external electromagnetic fields causing induced charges that degrade performance
Solution Approach 1:
A shielding structure is introduced as an intermediary element between the inductance structure and external electromagnetic fields. The shielding structure includes a shielding layer formed over a substrate, with the inductance structure positioned over the shielding layer, thereby mediating the interaction between the inductance structure and external EM fields to prevent harmful induced charges
2Object-affected harmful factors
If a shielding structure is added around the inductance structure, then the shielding effectiveness against electromagnetic fields is improved, but the manufacturing process becomes more complex
Solution Approach 1:
The shielding structure is merged with the substrate and inductance structure formation processes. The shielding layer is formed over the substrate using the same manufacturing steps as the inductance structure, and the substrate itself serves as part of the shielding structure, combining multiple functions into a unified structure that simplifies manufacturing
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The shielding structure effectively reduces unwanted charges induced by external electromagnetic fields, enhancing the stability and reliability of the current in semiconductor devices.
Implementation Method 1
A shielding structure is arranged around the inductance structure, partially or fully, to shield it from external electromagnetic fields
Data Source
AI summary
A semiconductor device includes an inductance structure and a shielding structure. The shielding structure is arranged to at least partially shield the inductance structure from external electromagnetic fields. The shielding structure includes a shielding structure portion arranged along a side of the inductance structure such that the shielding structure portion is around at least a portion of a perimeter of the inductance structure.