Induction Coil Phase Control for Uniform Substrate Heating
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Temperature discrepancies occur at zone boundaries in induction heating zones during substrate processing, leading to non-uniform heating of substrates.
Innovation Solution
A substrate processing apparatus with multiple induction coils along the longitudinal direction, where a phase difference is set between adjacent coils to minimize temperature discrepancies at zone boundaries, using a controller to adjust the phase difference to a predetermined value.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If multiple induction coils are used to heat different zones, then the heating coverage is improved, but temperature discrepancies occur at zone boundaries
Solution Approach 1:
The patent applies dynamics by making the phase difference between adjacent coils adjustable rather than fixed. The controller dynamically changes the phase difference based on real-time temperature measurements from thermocouples, allowing the system to adapt and eliminate temperature discrepancies at zone boundaries while maintaining comprehensive heating coverage.
Solution Approach 2:
The patent changes the electrical parameter (phase difference) of the induction coils to control temperature distribution. By adjusting the phase difference between adjacent coils, the system optimizes heat distribution at zone boundaries, resolving the temperature uniformity issue while preserving the extended heating coverage provided by multiple coils.
2Ease of operation
If the phase difference between adjacent coils is set to zero, then the control is simplified, but temperature discrepancies at zone boundaries increase
Solution Approach 1:
The patent implements feedback control by using thermocouples to continuously monitor temperature at zone boundaries and adjusting the phase difference between adjacent coils accordingly. This closed-loop system maintains temperature uniformity while automating the control process, balancing operational simplicity with temperature precision.
3Temperature
If more coils are added to reduce temperature discrepancies, then temperature uniformity is improved, but device complexity increases
Solution Approach 1:
Instead of adding more coils, the patent achieves temperature uniformity by changing the phase difference parameter of existing adjacent coils. This approach eliminates temperature discrepancies through electrical parameter adjustment rather than increasing hardware complexity, maintaining a simpler coil configuration while improving temperature distribution.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus achieves more uniform heating across the substrate, improving productivity and reducing energy consumption by maintaining consistent temperature profiles.
Implementation Method 1
an interior of the process chamber is inductively heated to a predetermined temperature by using a magnetic coil
Data Source
AI summary
There is provided a technique that includes (a) a process tube in which a substrate is accommodated and heat-treated; (b) a plurality of coils that are disposed along a longitudinal direction of the process tube and supplied with radio-frequency power from a power source; and (c) a controller configured to be capable of setting a phase difference between two adjacent coils, among the plurality of coils, to a predetermined value, wherein in (c) the predetermined value is changeable and is set so as to make a temperature discrepancy occurring in a vicinity of a boundary between the two adjacent coils smaller than a temperature discrepancy when the phase difference is set to zero.