Induction Coil and Shield Layout for Efficient Ingot Heating

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Solution Overview

Problem

Conventional ingot manufacturing apparatuses using resistance heating methods consume excessive power due to heaters that heat not only the crucible but also the entire ingot growing apparatus, leading to inefficiencies.

Innovation Solution

An ingot growing apparatus with a heater comprising a coil wound around the susceptor to generate a magnetic field for electromagnetic induction heating, and a shield to block exposure of the coil to the inner space, reducing heat transfer to other parts of the apparatus.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a resistance heating method is used to heat the crucible, then the crucible can be heated to produce molten silicon, but the entire inside of the ingot growing apparatus is heated causing large power energy consumption

Engineering Contradiction:

Improvecrucible temperatureVSAvoidpower energy consumption

Core Design Contradiction:

TemperatureVSUse of energy by moving object

Solution Approach 1:

The heating system is segmented into a localized induction heater that only heats the crucible region, rather than using a resistance heater that heats the entire apparatus interior. The coil is positioned to create a concentrated magnetic field zone around the crucible only.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The resistance heating method is replaced with electromagnetic induction heating. Instead of using resistive heating elements that radiate heat throughout the chamber, an induction coil generates a magnetic field that directly induces eddy currents in the crucible, converting electromagnetic energy to thermal energy locally at the crucible.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Use of energy by moving object

If the coil is exposed to the inner space of the growth furnace, then the coil can be positioned close to the susceptor for efficient heating, but arcs may be generated in the vacuum atmosphere

Engineering Contradiction:

Improveheating efficiencyVSAvoidarc generation

Core Design Contradiction:

Use of energy by moving objectVSObject-affected harmful factors

Solution Approach 1:

A ceramic shield is introduced as an intermediary component between the induction coil and the vacuum chamber interior. The shield allows the coil to be positioned close to the susceptor for efficient heating while physically blocking the vacuum environment from直接接触 the coil, preventing arc discharge.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The shield is made of ceramic material which combines electrical insulation properties to prevent arcing with thermal radiation resistance to maintain heating efficiency. The ceramic material allows thermal energy to pass through while blocking direct electrical discharge into the vacuum.

Inventive Principle:

Principle #40Composite materials

3Ease of operation

If separate support members are used to hold the coil, then the coil can be supported at the correct position, but the purity of the ingot may be compromised

Engineering Contradiction:

Improvecoil supportVSAvoidingot purity

Core Design Contradiction:

Ease of operationVSLoss of substance

Solution Approach 1:

The support function is merged with the ceramic shield structure. The shield itself is designed with integrated support features (such as protrusions or mounting points) that directly hold the induction coil, eliminating the need for separate support members that could contaminate the ingot.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution improves energy efficiency by heating only the crucible, prevents arc generation in a vacuum atmosphere, and maintains purity by eliminating the need for separate support members.

Implementation Method 1

a coil which is fixed at a position spaced a predetermined distance apart from an outer surface of the susceptor, is formed to be wound along the outer surface of the susceptor to generate a magnetic field, and heats the susceptor by electromagnetic induction due to the magnetic field

Methodology Applied

Scientific EffectElectromagnetic induction: Electromagnetic Induction

Data Source

PatentUS12492486B2Ingot growing apparatus comprising heater and method for manufacturing heater for ingot growing apparatus

Publication Date: 2025.12.09 HANWHA SOLUTIONS CORP

AI summary

An ingot growing apparatus is disclosed. An ingot growing apparatus comprising a heater according to an aspect of the present invention may comprise: a crucible for accommodating molten silicon; a growth furnace having an inner space in which the crucible is installed; a susceptor having an inner surface shaped to correspond to an outer surface of the crucible and surrounding the outer surface of the crucible; and a heater for heating the susceptor, wherein the heater may comprise: a coil which is fixed at a position spaced a predetermined distance apart from an outer surface of the susceptor, is formed to be wound along the outer surface of the susceptor to generate a magnetic field, and heats the susceptor by electromagnetic induction due to the magnetic field; and a shield which is formed to surround an outer surface of the coil to support the coil and blocks the coil from being exposed to the inner space of the growth furnace.