Induction Heating Crucible for Uniform Single Crystal Growth

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Solution Overview

Problem

The sublimation method for producing single crystals, such as silicon carbide, often results in a temperature difference within the crucible, leading to insufficient sublimation of source material powder near the central axis, which decreases the growth rate of the single crystal.

Innovation Solution

The method involves using a crucible with a peripheral wall and a spacer to create a space below the bottom part, where an auxiliary heating member, typically made of graphite, is heated by induction heating to emit radiant heat, ensuring a higher temperature near the central axis and promoting sublimation of the source material powder.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If induction heating is applied to the peripheral wall part of the crucible, then the source material powder near the periphery sublimes effectively, but the source material powder near the central axis does not sublime sufficiently, resulting in low growth rate

Engineering Contradiction:
Improvegrowth rate of single crystalVSAvoidtemperature distribution uniformity
Core Design Contradiction:
ProductivityVSTemperature

Solution Approach 1:

The heating function is segmented between two independent heating sources: the peripheral wall part and the auxiliary heating member. The peripheral wall part provides heating for the peripheral region, while the auxiliary heating member positioned at the bottom provides heating for the central region, allowing independent optimization of each heating zone to achieve uniform overall temperature distribution

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The auxiliary heating member acts as an intermediary heating device introduced between the heat source and the source material powder in the central region. This intermediary component enables indirect heating of the central area through thermal radiation and conduction, complementing the direct heating from the peripheral wall and achieving balanced temperature distribution

Inventive Principle:
Principle #24Intermediary (Mediator)

2Volume of moving object

If the crucible size is increased to produce larger single crystals, then the production capacity is improved, but temperature gradients become more severe, leading to insufficient sublimation in the central region

Engineering Contradiction:
Improvecrucible volumeVSAvoidtemperature gradient
Core Design Contradiction:
Volume of moving objectVSTemperature

Solution Approach 1:

The heating approach transitions from purely radial heating (peripheral wall only) to three-dimensional heating by adding a vertical heating component at the bottom. This dimensional change in heating geometry allows effective heating of the central region in larger crucibles, compensating for the increased temperature gradients that arise with larger volumes

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach increases the growth rate of the single crystal by ensuring uniform heating and reducing temperature differences within the crucible, even in larger crucibles where temperature gradients would typically hinder growth.

Implementation Method 1

the auxiliary heating member that is placed so as to face the outer surface of the bottom part with the space therebetween is heated by induction heating

Methodology Applied
Scientific EffectInduction heating: Induction Heating

Implementation Method 2

an auxiliary heating member that is placed so as to face the outer surface of the bottom part with the space therebetween is heated by induction heating to emit radiant heat

Methodology Applied
Scientific EffectThermal radiation: Thermal Radiation

Implementation Method 3

sublime the source material powder to cause recrystallization on the seed crystal

Methodology Applied
Scientific EffectSublimation: Sublimation

Implementation Method 4

cause recrystallization on the seed crystal

Methodology Applied
Scientific EffectCrystallization: Crystallisation

Data Source

PatentUS9777401B2Method for producing single crystal
Publication Date: 2017.10.03 SUMITOMO ELECTRIC INDUSTRIES LTD
  • US9777401B2 patent drawing
  • US9777401B2 patent drawing
  • US9777401B2 patent drawing

AI summary

A method for producing a single crystal includes a step of placing a source material powder and a seed crystal within a crucible; and a step of growing a single crystal on the seed crystal. The crucible includes a peripheral wall part and a bottom part and a lid part that are connected to the peripheral wall part to close the openings of the peripheral wall part. In the step of growing the single crystal on the seed crystal, the crucible is disposed on a spacer so as to form a space starting directly below an outer surface of the bottom part, and the peripheral wall part and an auxiliary heating member that is placed so as to face the outer surface of the bottom part with the space therebetween are heated by induction heating to sublime the source material powder to cause recrystallization on the seed crystal.