Induction Heated Fluidized Bed Reactor for Granular Polysilicon

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional fluidized bed reactors face issues with energy inefficiency, silicon deposition on internal walls, and reduced production capacity due to external heating methods, leading to poor heating uniformity and increased costs, especially in large-scale operations.

Innovation Solution

The implementation of an induction heating system within a fluidized bed reactor, utilizing a coaxial tube design with an induction coil and ferromagnetic heating elements to directly heat silicon particles, reducing reactor wall temperature and minimizing silicon deposition.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If external heating methods (liner heating, radiation heating, conduction heating) are used in fluidized bed reactors, then the reactor can be heated, but the reactor wall temperature becomes higher than the material temperature inside, causing silicon deposition on internal walls and preventing heat transfer toward the fluidized bed

Engineering Contradiction:
Improvereactor wall temperatureVSAvoidheat transfer efficiency
Core Design Contradiction:
TemperatureVSLoss of energy

Solution Approach 1:

Instead of heating the reactor wall from outside (conventional method), the patent inverts the heating approach by placing heating elements inside the reactor that heat the silicon particles directly. This reverses the temperature gradient direction, ensuring the material inside is hotter than the wall, preventing silicon deposition and enabling efficient heat transfer to the fluidized bed.

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The patent introduces ferromagnetic silicon particles as an intermediary medium. These particles are heated by induction heating elements and then transfer heat to the fluidized bed through convection and conduction, acting as a mobile heat carrier that efficiently distributes thermal energy throughout the reactor without requiring high wall temperatures.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Temperature

If external heating methods are used, then the reactor can be heated, but heating uniformity deteriorates and energy consumption increases, especially in large-scale operations

Engineering Contradiction:
Improveheating uniformityVSAvoidenergy consumption
Core Design Contradiction:
TemperatureVSUse of energy by moving object

Solution Approach 1:

The silicon particles in the fluidized bed serve a dual function: they are both the material being processed and the heat transfer medium. The induction heating elements directly heat the ferromagnetic silicon particles, which then distribute heat uniformly throughout the bed through their natural circulation, making the system self-heating and eliminating the need for external heating infrastructure.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent replaces conventional thermal conduction heating (which requires heat to conduct through the reactor wall) with electromagnetic induction heating. This substitution allows direct heating of the silicon particles through electromagnetic fields, achieving uniform heating throughout the fluidized bed without energy loss through the reactor walls.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Productivity

If conventional external heating is used, then the reactor structure is simple, but production capacity decreases due to frequent shutdowns for maintenance and detection

Engineering Contradiction:
Improveproduction capacityVSAvoidreactor operation continuity
Core Design Contradiction:
ProductivityVSDuration of action of stationary object

Solution Approach 1:

The ferromagnetic silicon particles perform multiple functions simultaneously: they serve as the reaction material, the heat transfer medium, and the heating target. This multi-functionality eliminates the need for separate heating systems and reduces maintenance requirements, allowing continuous operation and increasing production capacity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Manufacturing precision

If rod-like polysilicon product is produced by modified Siemens method, then high purity can be achieved, but post treatment costs increase and contamination risk rises

Engineering Contradiction:
Improvepolysilicon purityVSAvoidpost treatment cost
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

Instead of producing rod-like polysilicon that requires subsequent fracturing and treatment, the patent inverts the product form by directly producing granular polysilicon particles through fluidized bed deposition. This eliminates the need for post-treatment processes such as fracturing, sorting, and cleaning, reducing costs and contamination risk while maintaining high purity.

Inventive Principle:
Principle #13The other way round (Inversion)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances heating efficiency, increases production capacity, and improves polysilicon purity while reducing operational costs and the need for frequent reactor maintenance, enabling large-scale industrial application with higher output and safety.

Implementation Method 1

utilizing a coaxial tube design with an induction coil and ferromagnetic heating elements to directly heat silicon particles

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

induction heating system within a fluidized bed reactor, utilizing a coaxial tube design with an induction coil and ferromagnetic heating elements to directly heat silicon particles

Methodology Applied
Scientific EffectEddy currents: Eddy Currents

Implementation Method 3

pyrolysing the silicon-containing raw gas and depositing silicon on the surface of the seed particles

Methodology Applied
Scientific EffectThermolysis: Pyrolysis

Implementation Method 4

adding silicon seed particles through a seed feeding inlet to the fluidized bed reactor, and adding a silicon-containing raw gas and a fluidizing gas through the distributor, so as to fluidize the silicon seed particles to form a fluidized bed

Methodology Applied
Scientific EffectFluidization: Fluidisation

Data Source

PatentEP2987771B1Fluidized bed reactor and method thereof for preparing high-purity granular polycrystalline silicon
Publication Date: 2022.04.27 JIANGSU ZHONGNENG POLYSILICON TECH DEV
  • EP2987771B1 patent drawingFigure 1
  • EP2987771B1 patent drawingFigure 2
  • EP2987771B1 patent drawingFigure 3

AI summary

The present invention relates to a fluidized bed reactor, comprising a reaction tube, a distributor and a heating device, the reaction tube and the distributor at the bottom of the reaction tube composing a closed space, the distributor comprising a gas inlet and a product outlet, and the reaction tube comprising a tail gas outlet and a seed inlet at the top or upper part respectively, characterized in that the reaction tube comprises a reaction inner tube and a reaction outer tube, and the heating device is an induction heating device placed within a hollow cavity formed between the external wall of the reaction inner tube and the internal wall of the reaction outer tube, wherein the hollow cavity is filled with hydrogen, nitrogen or inert gas for protection, and is able to maintain a pressure of about 0.01 to about 5MPa; and also to a process of producing high purity granular polysilicon using the reactor. The fluidized bed reactor according to the present invention uses induction heating to heat directly the silicon particles inside the reaction chamber, such that the temperature of the reaction tube is lower than that inside the reaction chamber, which accordingly avoids deposition on the tube wall and results in more uniform heating, and thus is useful for large diameter fluidized bed reactors with much increased output for a single reactor.