Induction-Heated Holding Tray for Precise Substrate Temperature Control
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Solution Overview
Problem
Existing substrate processing apparatuses face inefficiencies in heating substrates due to high power consumption and inferior temperature controllability, as well as increased gas consumption and particle generation, primarily because they rely on heating large-capacity rotary tables with resistance heaters.
Innovation Solution
A substrate processing apparatus utilizing an induction heating coil to heat a holding tray with a magnetic member, which is supported by a rotary table made of insulating material, reducing heat transfer and allowing for precise temperature control while minimizing power consumption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If resistance heaters are used to heat large-capacity rotary tables, then substrates can be heated, but power consumption increases and temperature controllability deteriorates
Solution Approach 1:
The patent replaces the resistance heating system (thermal conduction-based) with an induction heating system (electromagnetic induction-based). The induction coil generates a magnetic field that directly induces eddy currents in the magnetic member attached to the holding tray, converting electromagnetic energy directly into heat at the substrate location, thereby eliminating the need to heat the entire rotary table and improving both power efficiency and temperature control precision.
Solution Approach 2:
The patent applies local quality by attaching a magnetic member specifically to the holding tray that contains the substrate, rather than heating the entire rotary table. This allows the magnetic field to be concentrated at the substrate location, enabling localized heating with precise temperature control while minimizing energy consumption and avoiding unnecessary heating of other components.
2Reliability
If large-capacity rotary tables are heated, then substrates can be processed, but gas consumption increases and particle generation increases
Solution Approach 1:
The induction heating system replaces the conventional resistance heater system, enabling direct heating of the substrate through electromagnetic induction. This eliminates the need to heat the entire rotary table structure, thereby reducing the volume of gas that needs to be circulated and controlled, which in turn reduces gas consumption and minimizes particle generation from heated surfaces.
Solution Approach 2:
The patent extracts the heating function from the rotary table structure itself and relocates it to the holding tray via the magnetic member. This separation allows the substrate to be heated independently without heating the entire rotary table, reducing the amount of gas required for the processing environment and minimizing particle generation from unnecessary heated surfaces.
3Temperature
If resistance heaters heat the entire rotary table, then substrates can be heated, but heat transfer to substrate is inefficient
Solution Approach 1:
The patent replaces thermal conduction heating (resistance heaters heating the rotary table) with electromagnetic induction heating. The induction coil generates a magnetic field that directly induces eddy currents in the magnetic member, which is attached to the holding tray containing the substrate. This direct electromagnetic-to-thermal energy conversion at the substrate location dramatically improves heating efficiency and eliminates energy loss through the rotary table structure.
Solution Approach 2:
The magnetic member acts as an intermediary between the induction coil and the substrate. The induction coil generates a magnetic field that is converted into heat within the magnetic member through electromagnetic induction, and this heat is then transferred directly to the substrate in the holding tray, providing efficient and controlled heating without the energy losses associated with heating the entire rotary table.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces power consumption and improves temperature controllability, decreases gas consumption, and minimizes particle generation by focusing heat directly on the substrate, thereby enhancing the efficiency and cleanliness of the substrate processing.
Implementation Method 1
an induction heating coil (7) arranged below the rotary table (2) in the chamber (1), and configured to induction-heat the holding tray (25)
Data Source
AI summary
A substrate heating apparatus includes: an induction heating coil; a holding tray including a substrate holder that places and holds a substrate thereon, and configured to be induction-heated by the induction heating coil; and a rotary table configured to support the holding tray and provided to be freely rotatable.