Induction Heating Between Substrate and Spin Base
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Solution Overview
Problem
The existing substrate processing apparatuses have a reduced heating efficiency due to the long distance between the substrate and the heat generating plate, which is located inside the spin chuck, leading to inefficient heating during the processing of substrates.
Innovation Solution
A substrate processing apparatus with a spin motor that rotates the substrate using chuck members, an IH heating mechanism with a heat generating member between the substrate and the spin base, and an IH circuit that applies an alternating magnetic field to the heat generating member for efficient heating, eliminating the need for direct electrical connection and allowing the heat generating member to be positioned closer to the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the heat generating plate is provided inside the spin chuck, then the substrate can be heated during rotation, but the distance between the substrate and heat generating plate is long, reducing heating efficiency
Solution Approach 1:
Instead of placing the heat generating plate inside the spin chuck below the substrate, the invention inverts this arrangement by placing the heat generating member on the spin chuck upper surface, directly above the substrate. This inversion dramatically shortens the heat transmission distance from several millimeters to less than 1 millimeter, thereby resolving the contradiction between maintaining substrate heating capability and improving heating efficiency.
2Ease of manufacture
If a heat generating plate inside the spin chuck is used, then heating can be performed, but the long distance reduces heating efficiency
Solution Approach 1:
The invention replaces the conventional thermal conduction-based heating system with an induction heating system that uses electromagnetic fields. The heating coil generates an alternating magnetic field that induces eddy currents in the heat generating member, which then produces heat through resistive heating. This substitution eliminates the need for direct thermal contact and long heat transmission paths, achieving high heating efficiency while maintaining structural simplicity.
3Productivity
If the heat generating member is arranged between the substrate and spin base, then heating efficiency is enhanced, but the structure becomes more complex
Solution Approach 1:
The invention merges the heat generating member with the spin chuck upper surface, making them an integrated structure. The heat generating member is formed as a substantially disk-shaped component that is directly coupled to the spin chuck upper surface, eliminating the need for separate mounting structures and reducing overall system complexity while maintaining the shortened distance for efficient heating.
4Productivity
If the heat generating member is positioned closer to the substrate, then heating efficiency improves, but rotational speed may be limited by connection structures
Solution Approach 1:
The invention replaces mechanical electrical connections with wireless power transmission using electromagnetic fields. The induction heating system uses a heating coil that generates an alternating magnetic field to induce currents in the heat generating member, eliminating the need for rotating electrical contacts or slip rings. This substitution removes the speed limitations imposed by mechanical connection structures, allowing the substrate to rotate at high speeds while maintaining efficient heating.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances heating efficiency by shortening the distance between the substrate and the heat generating member, allowing for uniform processing and increased temperature control without limiting the substrate's rotation speed.
Implementation Method 1
an IH circuit that causes the heating coil to generate an alternating magnetic field to be applied to the heat generating member by supplying electric power to the heating coil
Implementation Method 2
an IH heating mechanism that includes a heat generating member arranged between the substrate gripped by the plurality of chuck members and the spin base, a heating coil arranged under the spin base, and an IH (induction heating) circuit
Data Source
AI summary
A substrate processing device is provided with: a spin base disposed below a substrate grasped by a plurality of chuck members, the spin base transmitting the drive force of a spin motor to the chuck members; and a nozzle for supplying a processing fluid for processing the substrate to the top surface and/or bottom surface of the substrate. An IH heating mechanism of the substrate processing device has: a heat-generating member disposed between the substrate and the spin base; a heating coil disposed below the spin base; and an IH circuit for supplying electric power to the heating coil, whereby an alternating magnetic field applied to the heat-generating member is generated, and the heat-generating member is caused to generate heat.