Inductive Power Rail Structure for Low-Heat Wafer Transport
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Solution Overview
Problem
In semiconductor manufacturing facilities, existing wireless power transmission methods, particularly magnetic resonance, face challenges with high heat generation due to temperature sensitivity, which complicates the application in clean environments.
Innovation Solution
A power supply apparatus is designed with a first base member made of conductive material and a second base member made of magnetic core material, configured to reduce stray load loss and heat generation by minimizing eddy currents through magnetic coupling, using materials like ferrite cores and mu-metal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If magnetic resonance method is used to supply power to transport device, then power supply capability is improved, but heat generation increases
Solution Approach 1:
A magnetic core member made of ferrite or mu-metal is introduced as an intermediary between the power supply coil and the transport device. This magnetic core concentrates and guides the magnetic flux, improving power transfer efficiency while the ferrite material's inherent properties suppress eddy currents, thereby reducing heat generation in the base member.
Solution Approach 2:
The patent changes the material parameter of the base member from conventional conductive materials to ferrite or mu-metal, which have high magnetic permeability and low eddy current losses. This parameter change allows the system to maintain high power supply capability while significantly reducing heat generation through suppressed eddy currents.
2Loss of energy
If magnetic resonance method with high power density is applied, then power supply efficiency is improved, but heat generation becomes excessive for temperature-sensitive facilities
Solution Approach 1:
The patent converts the potentially harmful eddy currents that cause heat generation into a beneficial effect by using ferrite material. The magnetic core structure guides magnetic flux efficiently while the ferrite's high resistivity suppresses eddy currents, transforming what would be energy loss into improved power transfer efficiency with minimal heat generation.
3Reliability
If wired cable power supply is used for transport device, then power supply stability is maintained, but cleanliness inside facility is compromised
Solution Approach 1:
The patent replaces the mechanical wired cable connection system with a wireless electromagnetic induction system. The power supply coil generates a magnetic field that induces current in the power reception coil of the transport device, eliminating the need for physical cable connections and thereby maintaining facility cleanliness while providing stable power supply.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses heat generation, ensuring a stable power supply while maintaining the cleanliness required in semiconductor manufacturing environments by reducing eddy currents and magnetic flux linkage.
Implementation Method 1
Magnetic induction is a method whereby an induced current is generated in the secondary coil by a magnetic field created by the current flowing in the primary coil
Implementation Method 2
a second base member provided on a surface of the first base member and made of a magnetic core material
Implementation Method 3
configured to reduce stray load loss and heat generation by minimizing eddy currents through magnetic coupling, using materials like ferrite cores and mu-metal
Data Source
AI summary
Proposed is a power supply apparatus capable of suppressing heat generation, and semiconductor manufacturing equipment and a transport system including the same. The power supply apparatus, which supplies power to a transport device in semiconductor manufacturing equipment, includes a first base member made of a conductive material installed along a moving path of the transport device, a second base member provided on a surface of the first base member and made of a magnetic core material, a track member provided as an installation structure disposed on a side of the second base member, a power supply member installed in the track member and to which current is applied to supply power, and a power reception member disposed in a power reception core member provided in the transport device at a predetermined interval from the power supply member, and magnetically coupled to the power supply member to generate an induced current.