Inductive Wireless Motor Control With Low-Latency Signal Coupling
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Solution Overview
Problem
Conventional wireless motor driving systems experience delays in control signal transmission due to radiative wireless communication, which affects the precision and speed of motor control in semiconductor exposure devices, particularly in semiconductor exposure devices where precise and high-speed motor control is required.
Innovation Solution
A control system utilizing electromagnetic coupling for both power transmission and control signal transmission, featuring a power transmitting coil, a power receiving coil, a transmitting coupler, and a receiving coupler, which enables high-speed signal transmission with reduced delay by using a baseband method and synchronous rectification, eliminating the need for detection and feedback circuits.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If radiative wireless communication utilizing electromagnetic waves is performed in accordance with wireless LAN standards, then wireless power and control signal transmission is achieved, but communication delay of several hundred μs to several ms occurs due to protocol processing
Solution Approach 1:
The patent replaces radiative electromagnetic wave communication (wireless LAN) with inductive electromagnetic coupling communication. This substitution eliminates protocol processing delays by using direct magnetic field coupling between coils, achieving communication speeds in the μs range instead of hundreds of μs to ms, while maintaining wireless operation capability
Solution Approach 2:
The patent changes the fundamental parameter of electromagnetic interaction from radiative (far-field) to inductive (near-field coupling). By operating in the inductive coupling regime with properly tuned resonant frequencies, the system achieves faster response times and reduced communication delay while maintaining wireless power and signal transmission
2Reliability
If detection circuit and feedback control circuit are provided on power-receiving side, then control of rectification circuit is realized, but circuit size and weight on movable side increase
Solution Approach 1:
The patent extracts the detection and feedback control circuits from the movable power-receiving side and relocates them to the stationary power-transmitting side. The stationary side detects current and voltage, performs feedback control, and adjusts rectification accordingly, while the movable side only contains the motor and basic power reception circuitry, significantly reducing its weight
Solution Approach 2:
The patent makes the stationary power-transmitting side perform multiple functions: power transmission, signal transmission, current detection, voltage detection, and feedback control. This consolidation of functions on the stationary side eliminates the need for duplicate detection and control circuits on the movable side, reducing overall system weight while maintaining full feedback control capability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution achieves high-speed motor control with reduced circuit size and weight on the movable side, enabling precise and efficient motor operation with minimal delay in signal transmission, thereby enhancing the precision and exposure speed in semiconductor exposure devices.
Implementation Method 1
a power transmitting coil for wirelessly transmitting power supplied from a power source; a power receiving coil for wirelessly receiving power by electromagnetic coupling between the power transmitting coil and the power receiving coil
Implementation Method 2
a transmitting coupler for wirelessly transmitting a transmission signal for controlling the load portion; a receiving coupler for wirelessly receiving the transmission signal by electromagnetic coupling between the transmitting coupler and the receiving coupler
Data Source
AI summary
A control system is provided that includes a power transmitting coil for wirelessly transmitting power supplied from a power source, a power receiving coil for wirelessly receiving power by electromagnetic coupling between the power transmitting coil and the power receiving coil, a driving circuit configured to drive a load portion using the power received via the power receiving coil, a transmitting coupler for wirelessly transmitting a transmission signal for controlling driving of the load portion, a receiving coupler for wirelessly receiving the transmission signal by electromagnetic coupling between the transmitting coupler and the receiving coupler, and a generation circuit configured to generate a driving signal for controlling the driving circuit from the transmission signal received via the receiving coupler.