Inductor Coil Groove Formation Using Quartz Insulating Paste
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Solution Overview
Problem
Existing inductor components face challenges in increasing the aspect ratio of coil conductor layers due to scattering of light during exposure, leading to shallow grooves and deteriorated coil characteristics, especially when alumina is used as a filler material in the insulating layer.
Innovation Solution
The use of an insulating paste composed of quartz and glass materials with similar refractive indexes, along with exposure to light of 350 nm or less, allows for deeper grooves to be formed, increasing the aspect ratio of coil conductor layers and improving coil characteristics by preventing light scattering and enabling smooth side surfaces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If alumina filler material is used in the insulating layer to secure strength, then the insulating layer strength is improved, but light scattering occurs during exposure making it impossible to radiate light to deeper portions, resulting in shallow grooves and inability to increase the aspect ratio of coil conductor layers
Solution Approach 1:
The patent changes the material parameter of the filler from alumina to quartz, which has a refractive index closer to the glass material. This parameter change reduces light scattering during exposure, enabling light to penetrate deeper into the insulating layer and form deeper grooves with higher aspect ratios, while maintaining the required insulating layer strength.
Solution Approach 2:
The patent uses a composite insulating layer material consisting of glass material and quartz filler material. This composite formulation optimizes both mechanical strength and optical properties, allowing the layer to maintain strength while enabling deep groove formation through reduced light scattering during the photolithography process.
2Manufacturing precision
If two coil conductor layers are brought into surface contact to increase the aspect ratio, then the aspect ratio increases, but a plurality of protrusions are formed on the side surfaces causing deterioration of coil characteristics
Solution Approach 1:
The patent performs preliminary action by forming a deep groove in the insulating layer before applying the coil conductor layer. This pre-formed deep groove allows the coil conductor layer to be deposited with a higher aspect ratio without requiring surface contact between multiple layers, thereby achieving the desired aspect ratio while maintaining smooth side surfaces and avoiding protrusions that would deteriorate coil characteristics.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enables the formation of coil conductor layers with higher aspect ratios and improved coil characteristics, enhancing current flow and Q value without the need for stacking multiple layers, thus preventing coil deterioration.
Implementation Method 1
Because alumina contained in the filler material has a high refractive index, when a groove is formed by exposing a negative photosensitive insulating layer to light, the light used for exposure scatters in the insulating layer and it is not possible to radiate light to a deeper portion in the insulating layer
Data Source
AI summary
A method of manufacturing an inductor component includes preparing an insulating paste that is photosensitive and that includes a filler material composed of quartz, a glass material and a resin material, and a conductive paste, forming a first insulating layer by applying the insulating paste, and exposing the first insulating layer in a state where a first portion of the first insulating layer is shielded by a mask. The method further includes removing the first portion of the first insulating layer to form a groove at a position corresponding to the first portion, applying the conductive paste in the groove to form a coil conductor layer in the groove, and applying the insulating paste on the first insulating layer and the coil conductor layer to form a second insulating layer.