Inductor Fill Layout for Lower Parasitic Capacitance

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Solution Overview

Problem

The presence of metallic fill elements in layers adjacent to inductor coils increases parasitic capacitance, degrading the quality factor (Q) of inductors, especially in low resistivity substrate technologies.

Innovation Solution

The density of structural fill elements is increased radially outward from the inner region of the coil, with fewer elements closer to the center and more elements in the outer region, reducing parasitic capacitance and enhancing the quality factor (Q).

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If structural fill elements are added to layers adjacent to inductor coils, then structural stability is improved, but parasitic capacitance increases and quality factor deteriorates

Engineering Contradiction:
Improvestructural stabilityVSAvoidquality factor
Core Design Contradiction:
Stability of the object's compositionVSReliability

Solution Approach 1:

The patent applies local quality by varying the density of structural fill elements based on their radial position relative to the inductor coil. The fill element density is lower in the inner region (closer to the coil) and higher in the outer region (farther from the coil), creating a non-uniform distribution that optimizes both structural support and electrical performance in different locations

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent changes the parameter of fill element density as a function of radial distance from the inductor coil center. By adjusting this density parameter spatially - lower density near the coil and higher density farther away - the solution resolves the contradiction between providing structural stability and minimizing parasitic capacitance effects on the quality factor

Inventive Principle:
Principle #35Parameter changes

2Strength

If fill element density is increased in the inner region, then structural support is improved, but parasitic capacitance effects increase and performance deteriorates

Engineering Contradiction:
Improvestructural supportVSAvoidparasitic capacitance
Core Design Contradiction:
StrengthVSObject-generated harmful factors

Solution Approach 1:

The patent implements local quality by creating spatially varying fill element density where the inner region (near the coil) has lower density to minimize parasitic capacitance, while the outer region has higher density to provide structural support. This local differentiation resolves the contradiction between structural support and harmful parasitic effects

Inventive Principle:
Principle #3Local quality

3Ease of manufacture

If uniform fill element density is used across all regions, then manufacturing is simplified, but magnetic field performance is degraded

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidmagnetic field performance
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent applies local quality by implementing different fill element densities in different radial regions. The inner region uses lower density to preserve magnetic field performance, while the outer region uses higher density for structural support, thereby resolving the contradiction between manufacturing simplicity and magnetic field performance

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS20250342998A1Inductor with increasing outer fill density
Publication Date: 2025.11.06 GLOBALFOUNDRIES US INC
  • US20250342998A1 patent drawing
  • US20250342998A1 patent drawing
  • US20250342998A1 patent drawing

AI summary

A structure includes a first layer having inductor windings. An inner area of the first layer is at least partially enclosed by the inductor windings and an outer area of the first layer is separated from the inner area by the inductor windings. This structure further includes a second layer having structural fill elements. The first layer and the second layer are parallel, and the second layer is relatively below the first layer in a direction perpendicular to the first layer. The density of the structural fill elements aligned below the inner area is less than the density of the structural fill elements aligned below the outer area.