High-Q Integrated Inductor with Tree-Topology Shielding
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Solution Overview
Problem
Conventional integrated inductors face significant energy loss due to substrate losses, including Ohmic and Eddy current losses, which are not effectively reduced by existing shielding structures that often lead to additional energy loss themselves.
Innovation Solution
A tree-topology shielding structure with clusters of branches oriented at a 45-degree angle relative to the coil's metal segments is used, providing both electrical and magnetic field isolation while minimizing self-energy loss, thus reducing substrate losses and enhancing the Q factor.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a shielding structure is inserted between the coil and substrate, then electric and magnetic field coupling is reduced, but energy loss of the shielding structure itself increases due to Eddy current loss
Solution Approach 1:
The shielding structure is divided into multiple metal segments arranged in a specific geometric pattern (e.g., interdigitated fingers or radial segments) rather than a continuous structure. This segmentation interrupts the formation of large Eddy current loops while maintaining the shielding effect against substrate loss.
Solution Approach 2:
Different regions of the shielding structure have different orientations and configurations tailored to address specific field coupling issues in different areas. The metal segments are positioned and oriented to provide localized shielding where most needed while minimizing Eddy current paths in those same regions.
2Loss of energy
If the shielding structure is configured perpendicular to the integrated inductor, then magnetic field coupling between coil and shielding structure is reduced, but magnetic field coupling between coil and substrate is not reduced
Solution Approach 1:
The shielding structure uses planar metal segments arranged in specific two-dimensional patterns (such as interdigitated or radial configurations) rather than simple perpendicular orientation. This dimensional arrangement creates multiple localized shielding zones that effectively block magnetic field coupling to the substrate while limiting Eddy current formation through the segmented geometry.
Solution Approach 2:
The metal segments act as intermediary elements between the coil and substrate, providing localized magnetic shielding at specific positions and orientations. Each segment serves as a mediator to block field coupling in its specific region while the overall pattern prevents continuous Eddy current paths.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration achieves nearly perfect electrical field isolation and reduced Eddy current loss on the substrate, resulting in a high Q factor with minimal energy loss for the shielding structure itself.
Implementation Method 1
The Ohmic loss results from an electric field coupling between the coil and the substrate
Implementation Method 2
The Eddy current loss results from a magnetic field coupling
Implementation Method 3
The Eddy current loss results from a magnetic field coupling
Data Source
AI summary
A device having a substrate, a dielectric slab attached upon the substrate, a coil including a plurality of metal segments laid out on a first metal layer secured by the dielectric slab, the coil being substantially laterally symmetrical with respect to a central line from a top view perspective, and a shield laid out on a second metal layer secured by the dielectric slab and configured in a tree topology. The shield is substantially laterally symmetrical with respect to the central line from the top view perspective, the tree topology including a plurality of clusters of branches, wherein each of said plurality of clusters of branches is associated with a respective metal segment of the coil and includes a primary branch and at least one set of secondary branches that are branched from the primary branch, parallel to one another, and oriented at a substantially forty-five-degree angle with respect to the respective metal segment from the top view perspective.