Inert Anode Electrodeposition with Proton and Bubble Isolation

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Solution Overview

Problem

Inert anodes in electrodeposition systems produce protons and oxygen bubbles that interfere with the electrodeposition process, causing non-uniform deposition and non-uniform electrodeposition, and the oxygen bubble accumulation can occlude a target substrate, occlude a target substrate, block ionic current, and result in non-uniform electrodeposition, while active anodes are expensive and require frequent replacement.

Innovation Solution

Implement a proton-impeding structure, such as a metal redox barrier, to separate the anode chamber from an intermediate chamber, and an ion-exchange membrane to separate the intermediate chamber from the cathode chamber, along with a redox shuttle circulation system to reduce acid production and maintain chemical species concentrations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Duration of action of stationary object

If inert anodes are used in electrodeposition systems, then anode replacement frequency is reduced, but proton and oxygen bubble interference causes non-uniform deposition

Engineering Contradiction:
Improveanode service lifeVSAvoiddeposition uniformity
Core Design Contradiction:
Duration of action of stationary objectVSManufacturing precision

Solution Approach 1:

The system divides the anode chamber into multiple compartments separated by ion-exchange membranes, isolating different functional zones. This segmentation allows the inert anode to operate continuously while preventing harmful protons and bubbles from reaching the deposition zone, thus maintaining both long anode life and uniform deposition.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Ion-exchange membranes act as intermediary structures between the inert anode and the cathode chamber. These membranes selectively transport ions while blocking protons and oxygen bubbles, enabling the inert anode to provide sustained metal ions without allowing harmful byproducts to interfere with deposition uniformity.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Manufacturing precision

If active anodes are used in electrodeposition systems, then deposition uniformity is maintained, but anode replacement frequency increases

Engineering Contradiction:
Improvedeposition uniformityVSAvoiddowntime for anode replacement
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The system replaces expensive active anodes with inexpensive inert anodes that do not consume during operation. The inert anodes generate protons and bubbles instead of being consumed, eliminating the need for frequent replacements while maintaining deposition quality through membrane separation.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The ion-exchange membranes automatically manage the separation of harmful byproducts from the deposition zone without requiring external intervention. This self-regulating system maintains deposition uniformity continuously, eliminating downtime associated with manual anode replacement and system reconfiguration.

Inventive Principle:
Principle #25Self-service

3Loss of substance

If inert anodes are used, then operating cost is reduced, but oxygen bubbles occlude substrate and block ionic current

Engineering Contradiction:
Improveanode material consumptionVSAvoidbubble interference
Core Design Contradiction:
Loss of substanceVSObject-affected harmful factors

Solution Approach 1:

The system extracts and removes oxygen bubbles and protons from the vicinity of the substrate by using ion-exchange membranes that block their passage. The membranes allow beneficial metal ions to pass through while extracting harmful bubbles and protons into separate compartments, eliminating their interference with substrate deposition.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The system converts the harmful byproducts (protons and oxygen bubbles) generated by inert anodes into a beneficial configuration. By directing these byproducts into separate compartments through ion-exchange membranes, the system maintains the advantage of inert anode operation (no consumption, lower cost) while eliminating their harmful effects on deposition quality.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Prevents proton and oxygen bubble interference, ensuring uniform electrodeposition and reducing the need for active anode replacements, thus maintaining system efficiency and reducing downtime.

Implementation Method 1

The intermediate chamber is separated from the cathode chamber by an ion exchange

Methodology Applied
Scientific EffectIon exchange: Ion Exchange

Implementation Method 2

receive growth of a metal film on an anode side of the metal redox barrier by reduction of metal ions from anolyte contacting the anode side of the metal redox barrier

Methodology Applied
Scientific EffectReduction: Reduction

Implementation Method 3

provide metal ions to a solution contacting a cathode side of the metal redox barrier by oxidation of the metal redox barrier

Methodology Applied
Scientific EffectOxidation: Oxidation

Implementation Method 4

Electrodeposition involves the electrochemical reduction of dissolved ions of a selected metal to an elemental state on a substrate to form a film of the selected metal

Methodology Applied
Scientific EffectElectrodeposition: Electrodeposition

Implementation Method 5

Electrodeposition involves the electrochemical reduction of dissolved ions of a selected metal to an elemental state on a substrate

Methodology Applied
Scientific EffectElectrolysis: Electrolysis

Data Source

PatentUS20260002282A1Electrodeposition systems
Publication Date: 2026.01.01 LAM RES CORP
  • US20260002282A1 patent drawing
  • US20260002282A1 patent drawing
  • US20260002282A1 patent drawing

AI summary

Examples are disclosed that relate to operating an electrodeposition system comprising an inert anode. In one example system, the electrodeposition system includes a substrate holder and a cathode chamber configured to hold a catholyte. An anode chamber configured to hold an anolyte during the electrodeposition process comprises an inert anode. An intermediate chamber is positioned between the cathode chamber and the anode chamber. The intermediate chamber is separated from the cathode chamber by an ion exchange membrane.