Inert Gas Jacketed Liquid Supply for Moisture-Free Temperature Control
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Solution Overview
Problem
In resist coating apparatuses, the use of water for temperature adjustment can lead to unwanted moisture mixing with the treatment liquid, affecting the uniformity and shape of the resist pattern, which is a common issue in both resist and other treatment liquids requiring temperature control.
Innovation Solution
A liquid treatment apparatus design that employs a gas pipe encompassing the liquid supply pipe, where an inert gas flows through the space between them, allowing temperature adjustment of the treatment liquid without mixing water, utilizing a folded extension portion within the processing container for enhanced heat exchange and using a metallic material with high thermal conductivity for fixtures to promote heat exchange.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If water is used for temperature adjustment of treatment liquid, then temperature control is achieved, but moisture mixes with treatment liquid causing non-uniform resist pattern
Solution Approach 1:
The patent introduces an inert gas as an intermediary substance to transfer thermal energy from the water to the treatment liquid. The inert gas flows through a passage surrounded by the water supply pipe, absorbing heat from the water and then contacting the treatment liquid to adjust its temperature, thereby preventing direct water-treatment liquid contact that would cause moisture contamination
Solution Approach 2:
The temperature adjustment system is segmented into distinct functional zones: a water supply pipe for heat source, an inert gas passage for heat transfer mediation, and a treatment liquid flow path. This segmentation allows thermal energy transfer while maintaining physical separation between water and treatment liquid, preventing moisture mixing
2Volume of moving object
If temperature adjustment mechanism is integrated within the apparatus, then installation space is reduced, but the structure becomes more complex
Solution Approach 1:
The patent merges the temperature adjustment mechanism with the existing liquid supply structure by integrating the inert gas passage within the water supply pipe assembly. This consolidation allows the temperature adjustment function to be incorporated into the apparatus without requiring separate external equipment, thereby reducing installation space while maintaining structural efficiency
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively prevents moisture from being mixed with the treatment liquid during temperature adjustment, ensuring uniform resist film thickness and pattern integrity, while also reducing installation space requirements by integrating the temperature adjustment mechanism within the apparatus.
Implementation Method 1
a gas pipe that encompasses the liquid supply pipe and through which an inert gas for adjusting the temperature of the treatment liquid flows in a space between the gas pipe and the liquid supply pipe
Implementation Method 2
an extension portion of the gas pipe is folded back inside the processing container in a plan view, the extension portion being a portion between an upstream end inside the processing container and an encompassing portion that encompasses the liquid supply pipe
Data Source
AI summary
A liquid treatment apparatus includes: a substrate holder for holding a substrate; a discharge nozzle for discharging a treatment liquid onto the substrate; a liquid supply pipe for supplying the treatment liquid from a treatment liquid storage source to the discharge nozzle; a gas pipe that encompasses the liquid supply pipe and through which an inert gas for adjusting the temperature of the treatment liquid flows in a space between the gas pipe and the liquid supply pipe; a processing container in which the substrate holder, the discharge nozzle, the liquid supply pipe, and the gas pipe are provided; and an atmosphere gas supply part for supplying an atmosphere gas into the processing container. The gas pipe is provided so that an extension portion between an upstream end inside the processing container and an encompassing portion is folded back inside the processing container in a plan view.