Inert Gas Pneumatic Handling for Semiconductor Test Contact Reliability
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional contact pins in IC test devices suffer from rapid wear due to oxide formation, leading to increased maintenance costs and reduced measurement reliability, as they are exposed to air and reactive gases during testing, causing metal oxide deposits and increased electrical resistance.
Innovation Solution
The use of an inert gas, such as nitrogen, in the pneumatic system prevents air and reactive oxygen from reaching the contact region, reducing oxidation and extending the service life of contact pins by maintaining an inert atmosphere during the testing process, including the use of inert gas for temperature control and flushing the contact pins and components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If contact pins are exposed to air during testing, then oxygen is available for oxide formation on contact surfaces, but this leads to increased contact resistance and reduced service life
Solution Approach 1:
The patent applies an inert atmosphere by replacing air with nitrogen gas in the test chamber environment. This prevents oxidation of contact pin surfaces by eliminating reactive oxygen during the testing process, thereby maintaining low contact resistance and extending service life while ensuring reliable measurements
2Ease of operation
If conventional air is used in the pneumatic system, then the system operates normally for transport and temperature control, but reactive oxygen reaches the contact region causing oxidation
Solution Approach 1:
The patent changes the chemical composition parameter of the gas used in the pneumatic system from air (oxygen-containing) to nitrogen (inert gas). This substitution maintains the functional operation of the pneumatic system for transport and temperature control while eliminating the harmful oxidative effect on contact pins
3Reliability
If high normal force is applied by contact pins to penetrate oxide layers, then contact is achieved through metal oxide layers, but this mechanically stresses the test pins and deposits metal oxide on contact points
Solution Approach 1:
The patent applies preliminary anti-action by creating an inert nitrogen atmosphere before testing begins, which prevents oxide layer formation on contact pin surfaces. This eliminates the need for high normal forces to penetrate oxide layers, thereby reducing mechanical stress on contact pins and preventing metal oxide deposition while ensuring reliable electrical contact
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces contact resistance and prevents oxide formation, thereby increasing the service life of contact pins and improving measurement reliability by maintaining a consistent inert environment, even at varying temperatures.
Implementation Method 1
an inert gas, such as nitrogen, in the pneumatic system prevents air and reactive oxygen from reaching the contact region, reducing oxidation
Implementation Method 2
a pneumatic system with lines and control devices for operating at least one transport device
Implementation Method 3
the ICs are individually picked up by the holding devices that have carrier heads with vacuum pumps and that hold the components by suction
Implementation Method 4
contact pins that are integrated in a test socket and that establish a mechanical and electrical contact between the test socket and the integrated semiconductor circuits
Data Source
AI summary
A device is provided for subjecting a plurality of singulated semiconductor components to functional verification, which includes contact pins that are integrated in a test socket and establish a mechanical and electrical contact between the test socket and the integrated semiconductor circuits, a holding fixture (DUT board) connected to the test socket for transmitting electrical signals to and from a program-controlled electronic switching system, and lines and control devices for operating at least one pneumatic transport and holding device for picking up, orienting and positioning the singulated semiconductor components, an inert gas is provided as the medium for operating the pneumatic devices.