Inert Gas Sample Transfer Capsule for Beam Chamber Loading
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Solution Overview
Problem
Charged particle beam systems, such as FIB and electron beam systems, face challenges in maintaining samples within an inert gas environment during transfer to and from vacuum chambers, leading to potential chemical reactions like oxidation or nitridation when exposed to air.
Innovation Solution
A sample transfer capsule is designed to maintain samples in an inert gas environment by storing them in a container that can be adjusted between closed and open configurations, with an integrated inert gas storage chamber and valve to control gas flow, ensuring the samples remain sealed during transport and processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If samples are transferred outside the vacuum chamber, then beam system operation is enabled, but samples are exposed to atmosphere causing chemical reactions
Solution Approach 1:
An inert gas atmosphere (argon or nitrogen) is introduced as an intermediary between the sample and atmospheric oxygen, preventing direct contact between reactive sample surfaces and oxidizing atmosphere during transfer operations outside the vacuum chamber
Solution Approach 2:
The sample transfer capsule maintains a sealed inert gas environment throughout the transfer process, creating a chemically inert atmosphere that prevents oxidation and nitridation of samples while allowing mechanical transfer outside the vacuum chamber
2Object-affected harmful factors
If samples are kept sealed in inert gas, then chemical reactions are prevented, but transfer and beam processing becomes complex
Solution Approach 1:
The transfer capsule integrates multiple functions into a single unit: sample storage, inert gas sealing, vacuum compatibility, and beam accessibility. The capsule body combines the sealed chamber with mounting interfaces and beam transmission windows, eliminating the need for separate transfer mechanisms and environmental control systems
Solution Approach 2:
The transfer capsule serves multiple purposes: it acts as a sealed container for inert gas protection, a vacuum-compatible sample holder, a beam transmission window, and a mounting interface for the beam system stage. This multi-functionality reduces overall system complexity despite maintaining inert gas protection
3Reliability
If container is kept closed, then sample protection is maintained, but beam access is blocked
Solution Approach 1:
The capsule is segmented into distinct functional zones: a sealed inert gas environment for sample protection and a beam transmission window area that allows charged particle beam penetration. The window acts as a selective boundary that maintains atmospheric separation while enabling beam access to the sample
Data Source
AI summary
Various approaches are provided for transferring samples within an inert gas environment to and from a beam system. In one example, a sample transfer capsule includes a container configured to store a sample during transport, wherein the container is adjustable between a closed configuration and an open configuration, an inert gas storage chamber coupled to the container and configured to store an inert gas, and a valve coupled to the inert gas storage chamber and the container and configured to selectively allow the inert gas to flow from the inert gas storage chamber to the container when the container is in the closed configuration. In this way, samples may be maintained in an inert gas environment during transport and while beam system vacuum chambers are vented, thereby reducing exposure of the samples and subsequently reducing the rate of a chemical reaction, such as oxidation or nitridation, of the samples.