Inert Gas Temperature Sensor Assembly for High-Heat Oxidation Protection

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Solution Overview

Problem

Existing temperature measurement systems, such as those using tungsten-rhenium sheathed thermocouples, face challenges in maintaining accurate measurements under high-temperature environments due to potential oxidation and deterioration of the sheath tube, leading to inaccurate readings or disconnection.

Innovation Solution

A temperature measurement assembly is proposed, which includes a gas supply pipe with a flow path for inert gas, at least one temperature sensor with a measurement gauge outside the pipe, and a protective tube that encloses both the pipe and the sensor. The gas outlet is positioned higher than the sensor, allowing the inert gas to descend through a gap between the sensor and the tube, maintaining an inert atmosphere and preventing oxidation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a sheathed thermocouple is used for temperature measurement under high-temperature conditions, then the temperature measurement capability is improved, but the sheath tube deteriorates due to oxidation from substances generated in the process chamber, leading to inaccurate measurements or disconnection

Engineering Contradiction:

Improvetemperature measurement accuracyVSAvoidthermocouple durability

Core Design Contradiction:

Measurement precisionVSReliability

Solution Approach 1:

The patent employs a nested structure where the thermocouple is placed inside a sheath tube, which is in turn positioned within a protective tube. This multi-layer nesting provides progressive protection: the sheath tube offers initial protection while the protective tube creates a sealed inert atmosphere that prevents oxidation of the sheath tube, thereby maintaining measurement accuracy and reliability under high-temperature conditions

Inventive Principle:

Principle #7Nested doll (Nesting)

Solution Approach 2:

The patent introduces an inert gas (such as nitrogen or argon) into the protective tube to create an inert atmosphere that prevents oxidation of the sheath tube and thermocouple. This inert environment isolates the temperature sensing components from reactive substances generated in the process chamber, eliminating the deterioration problem while maintaining measurement capability

Inventive Principle:

Principle #39Inert atmosphere (Inert environment)

2Reliability

If the sheath tube is covered with a protective tube, then protection from oxidation is improved, but trapped released gases from the protective tube may cause long-term exposure and deterioration

Engineering Contradiction:

Improveprotection from oxidationVSAvoidexposure to trapped gases

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent extracts harmful trapped gases from the protective tube by providing a gas outlet that allows these gases to escape. This extraction prevents the accumulation and long-term exposure of the thermocouple to deteriorating substances, while the inert gas continuously supplied to the protective tube maintains the protective atmosphere

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The patent implements continuous supply of inert gas to the protective tube, ensuring that the protective inert atmosphere is maintained continuously. This continuous action prevents oxidation while the gas outlet simultaneously removes harmful trapped gases, creating a dynamic protective environment that eliminates both oxidation and gas trapping problems

Inventive Principle:

Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables stable and accurate temperature measurement over a long period under high-temperature conditions by maintaining an inert gas atmosphere around the temperature sensor, preventing oxidation and ensuring the longevity of the measurement system.

Implementation Method 1

a flow path through which a gas flows; the gas descends via a gap between an outer wall of the at least one temperature sensor and an inner wall of the protective tube

Methodology Applied

Scientific EffectGas flow: Convection

Data Source

PatentUS20250102373A1Temperature measurement assembly, substrate processing apparatus, method of processing substrate, and method of manufacturing semiconductor device

Publication Date: 2025.03.27 KOKUSAI DENKI KK

AI summary

There is provided a technique that includes: a gas supply pipe including therein a flow path through which a gas flows; at least one temperature sensor including a temperature measurement gauge disposed outside the gas supply pipe; and a protective tube inside which the gas supply pipe and the at least one temperature sensor are disposed, wherein an outlet of the gas supply pipe configured to eject the gas into the protective tube is positioned higher than the at least one temperature sensor, and the gas descends via a gap between an outer wall of the at least one temperature sensor and an inner wall of the protective tube.