Inertial Sensor Mass-Block Layout for Decoupled Multi-Axis Detection
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Solution Overview
Problem
Inertial sensors face challenges in achieving a small size and high detection precision due to interference between components detecting angular velocities in different directions, leading to inaccurate results and increased overall size.
Innovation Solution
The inertial sensor design includes first and second mass blocks with detection electrodes, connected by a first connector, allowing for orthogonal movements and capacitance variations to decouple angular velocity detection, with elastic connectors providing buffer spaces and reducing mutual impact, and a drive source powering both blocks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If separate detection parts for different rotationally symmetrical beams are disposed to avoid interference, then detection precision is improved, but overall size of the inertial sensor increases
Solution Approach 1:
The patent combines multiple detection functions into a shared detection electrode structure. The detection electrode is configured to detect capacitance changes from multiple mass blocks simultaneously, allowing the inertial sensor to detect angular velocities around different axes using a common detection mechanism rather than separate detection parts for each beam.
Solution Approach 2:
The detection electrode serves multiple functions by detecting capacitance variations from different mass blocks that are driven in different directions. This universal detection approach allows a single electrode structure to perform what would traditionally require multiple separate detection systems, reducing overall sensor size while maintaining detection precision.
2Volume of moving object
If mass blocks are closely integrated to reduce size, then volume is reduced, but mutual interference between detection components increases
Solution Approach 1:
The inertial sensor is segmented into multiple independent mass blocks (first mass block, second mass block, third mass block, fourth mass block) that are driven in orthogonal directions. Each mass block has its own drive electrodes and shares detection electrodes, creating functionally independent detection paths that minimize mutual interference while maintaining a compact integrated structure.
Solution Approach 2:
The detection electrode acts as an intermediary that mediates between multiple mass blocks and the readout circuitry. By using capacitance-based detection, the system indirectly measures the position of each mass block without direct mechanical contact or electromagnetic interference between the mass blocks themselves, reducing mutual interference in the compact structure.
3Adaptability or versatility
If orthogonal drive directions are used for different mass blocks, then detection of multiple angular velocity components is enabled, but coupling between detection signals increases
Solution Approach 1:
Each mass block is driven in a specific orthogonal direction with dedicated drive electrodes positioned to create localized electric fields. The first and second mass blocks are driven along the first direction, while the third and fourth mass blocks are driven along the second direction orthogonal to the first. This localized drive configuration enables multi-axis detection while minimizing signal coupling through directional separation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances detection precision by minimizing interference between components, reducing overall size, and improving sensitivity and noise filtering, while maintaining high precision in detecting three-axis angular velocities.
Implementation Method 1
the first mass block and the first detection electrode are arranged in a first direction to form a first capacitor, and the first capacitor is configured to detect an angular velocity around a second direction
Implementation Method 2
the second mass block and the second detection electrode are arranged in the second direction to form a second capacitor, and the second capacitor is configured to detect an angular velocity around the first direction
Implementation Method 3
the first mass block is configured to pull, by using the first connector, the second mass block to move in the second direction
Data Source
Figure 1~2
Figure 3A
Figure 3B
AI summary
An inertial sensor (20) and an electronic device (100) are provided. Amass block (312 or 315) of the inertial sensor (20) for detecting a Y-axis is driven to have a displacement component in an X-axis direction. When the inertial sensor (20) is subject to an angular velocity component around a Z-axis, the mass block (312 or 315) for detecting the Y-axis may pull a mass block (313 or 316) for detecting the Z-axis, so that the mass block (313 or 316) for detecting the Z-axis can have a displacement component in a Y-axis direction. The inertial sensor (20) can implement principle decoupling between Y-axis detection and Z-axis detection, thereby helping to consider both a size and detection precision of the inertial sensor (20).