Inertial Sensor Beam Rigidity Gradient Impact Absorption
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Solution Overview
Problem
Inertial sensors with high rigidity movable bodies and protrusions suffer from damage due to excessive seesaw swings, as the impact cannot be absorbed effectively, leading to potential damage and malfunction.
Innovation Solution
The inertial sensor design includes a substrate with a fixing portion, first and second movable bodies supported by beams, and a protrusion on the substrate or second movable body, where the second support beam is arranged to twist and absorb impact, reducing damage and restricting excessive seesaw swings by providing a damper function.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If high rigidity is provided to the movable body and protrusion to maintain structural strength, then the structural strength is improved, but the impact cannot be absorbed and damage may occur
Solution Approach 1:
The patent changes the rigidity parameter of the support beam by introducing a through-hole, creating a gradient rigidity structure where the beam has lower rigidity for impact absorption while maintaining overall structural strength. This resolves the contradiction by allowing the beam to deform elastically during impact while the movable body and protrusion maintain their structural integrity.
Solution Approach 2:
The patent pre-configures the support beam with reduced rigidity (through the through-hole design) to serve as a cushioning element before impact occurs. This allows the beam to absorb impact energy through elastic deformation, protecting the high-rigidity components from damage while maintaining their structural strength.
2Stability of the object's composition
If the protrusion is designed to prevent excessive swing contact, then the positional control is improved, but the impact during collision causes potential damage
Solution Approach 1:
The patent modifies the rigidity parameter of the support beam by introducing a through-hole, creating a gradient rigidity structure. This allows the beam to have lower rigidity for impact absorption while maintaining the positional control function of the protrusion, resolving the contradiction between stability and impact resistance.
Solution Approach 2:
The support beam acts as an intermediary element between the movable body and the fixed structure. By designing the beam with reduced rigidity (through-hole), it mediates the collision force, allowing the protrusion to maintain positional control while the beam absorbs the impact energy, preventing damage to both the protrusion and movable body.
3Stability of the object's composition
If the support beam is made rigid to maintain structural integrity, then the structural integrity is improved, but excessive seesaw swing cannot be restricted and damage may occur
Solution Approach 1:
The patent introduces a through-hole in the support beam to change its rigidity parameter, creating a gradient rigidity structure. This allows the beam to maintain sufficient structural integrity for normal operation while having reduced rigidity to restrict excessive seesaw swing through elastic deformation, resolving the contradiction between structural integrity and swing restriction.
Solution Approach 2:
The patent makes the support beam dynamically responsive by introducing a through-hole that allows it to deform elastically under excessive load. The beam maintains its structural integrity during normal operation but becomes more compliant during excessive swing, automatically adjusting its rigidity based on the applied force to prevent damage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design effectively reduces impact and damage to the movable bodies and protrusions, while maintaining the ability to detect acceleration by absorbing excessive seesaw swings, enhancing the mechanical strength and reliability of the inertial sensor.
Implementation Method 1
the second support beam is arranged in a second direction intersecting the first direction and that couples the first movable body and the second movable body
Implementation Method 2
the second support beam is arranged to twist and absorb impact
Implementation Method 3
a protrusion that is provided on the substrate or the second movable body, that overlaps the second movable body in plan view from a third direction intersecting the first direction and the second direction, and that protrudes toward the second movable body or the substrate
Implementation Method 4
The inertial sensor can detect an acceleration in the vertical direction based on a change in capacitance between a first movable part and a second movable part of the movable body
Data Source
AI summary
An inertial sensor, includes: a substrate; a fixing portion that is provided on the substrate; a first movable body that faces the substrate and that is displaceable with a first support beam as a first rotation axis; the first support beam that is arranged in a first direction and that couples the first movable body and the fixing portion; a second movable body that is displaceable due to deformation of a second support beam; the second support beam that is arranged in a second direction intersecting the first direction and that couples the first movable body and the second movable body; and a protrusion that is provided on the substrate or the second movable body, overlaps the second movable body in plan view from a third direction and that protrudes toward the second movable body or the substrate.


