Inertial Sensor Mass Body Density via Metal-Polymer Composite
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Solution Overview
Problem
Inertial sensors with silicon mass bodies have low density, leading to a low signal-to-noise ratio and reduced sensitivity due to high Brownian noise, and existing manufacturing methods have not effectively increased mass body density while maintaining precision.
Innovation Solution
A method of manufacturing inertial sensors by forming a mass body using a metal or a combination of metal and polymer on a base substrate with strategically designed concave parts, increasing the mass body's density and reducing Brownian noise, which includes preparing a base substrate, forming concave parts, and creating a flexible part to enhance sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a silicon mass body is used in the inertial sensor, then the manufacturing process is simple, but the density is low resulting in low signal-to-noise ratio and reduced sensitivity
Solution Approach 1:
The patent applies composite materials by combining metal (such as tungsten, platinum, or gold) with polymer materials to form the mass body. This composite structure increases the overall density of the mass body compared to pure silicon, thereby improving the signal-to-noise ratio and sensitivity of the inertial sensor while maintaining manufacturability through established composite material processing techniques.
Solution Approach 2:
The patent changes the material parameter (density) of the mass body by transitioning from silicon to metal or metal-polymer composites. This parameter change directly addresses the low signal-to-noise ratio issue by increasing mass density, which enhances the inertial signal strength relative to Brownian noise, thereby improving measurement precision without significantly complicating the manufacturing process.
2Measurement precision
If the density of the mass body is increased to improve sensitivity, then the signal-to-noise ratio improves, but the manufacturing process becomes more complex
Solution Approach 1:
The patent applies preliminary action by forming a cavity in the substrate before filling it with high-density metal or metal-polymer composite materials. This sequence allows for precise control of the mass body geometry and density without requiring complex post-processing steps. The cavity formation is done using standard semiconductor fabrication techniques, and the subsequent filling process is straightforward, thereby avoiding significant manufacturing complexity while achieving the desired density increase for improved sensitivity.
3Measurement precision
If a metal or metal-polymer composite is used to form the mass body, then the density increases and Brownian noise is reduced, but the manufacturing precision requirements increase
Solution Approach 1:
The patent performs preliminary cavity formation with precise dimensional control using standard semiconductor fabrication techniques before filling with metal or composite materials. This preliminary structuring ensures that the final mass body achieves the required geometric precision and density distribution without requiring excessively tight tolerances during the filling process itself, thereby managing manufacturing precision requirements effectively while achieving improved signal-to-noise ratio.
Solution Approach 2:
The patent uses the substrate cavity as an intermediary structure that pre-defines the mass body geometry. This intermediary approach allows for relaxed filling process tolerances since the cavity walls provide mechanical constraints that guide the material filling process, ensuring consistent mass body dimensions and density without requiring ultra-precise filling operations. This mediator structure effectively decouples the precision requirements between cavity formation and material filling steps.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method improves the sensitivity of inertial sensors by increasing the mass body's density and reducing Brownian noise, thereby enhancing the signal-to-noise ratio, while maintaining precise processing and avoiding processing errors.
Implementation Method 1
silicon, the mass body has relatively low density, such that a signal to noise ratio is low. Therefore, sensitivity of the inertial sensor is deteriorated. In order to solve this problem, the density of the mass body should be increased.
Data Source
AI summary
Disclosed herein is a method of manufacturing an inertial sensor. The method includes: (A) preparing a base substrate; (B) forming a depressed first concave part in one surface of the base substrate; (C) forming a mass body in the first concave part by filling a metal or a combination of a metal and a polymer (or a polymer matrix composite) therein; and (D) forming a depressed second concave part in one surface of the base substrate at an outer side of the mass body and forming a flexible part on an upper portion of the second concave part in the base substrate. The mass body formed of the metal or the combination of the metal and the polymer (or the polymer matrix composite) has high density, thereby making it possible to improve sensitivity of the inertial sensor.