Inertial Sensor Stress Reduction via Coupling Part Segmentation
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Solution Overview
Problem
Existing inertial sensors face challenges in sufficiently reducing bonding stress, which affects detection accuracy and reliability.
Innovation Solution
The inertial sensor design incorporates a substrate with multiple mounts and a lid that includes conductive members, with the sensor element bonded to these mounts and coupled to the conductive members through specific bonding parts, and features slits or through holes in non-bonded areas to reduce stress transmission.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the sensor element is bonded to the substrate through bonding parts, then the structural stability is improved, but the bonding stress affects the detection accuracy
Solution Approach 1:
The coupling part is divided into multiple regions: a first region that overlaps with the bonding part and a second region that does not overlap with the bonding part. This segmentation allows the second region to act as a stress-isolated zone, preventing bonding stress from transmitting to the sensor element while maintaining electrical connectivity through the conductive member.
Solution Approach 2:
Different regions of the coupling part have different functions: the first region provides mechanical support and electrical connection, while the second region specifically serves as a stress-free zone. This local differentiation of quality allows the structure to simultaneously achieve stability and measurement precision by assigning specific functional properties to specific areas.
2Reliability
If the coupling part completely overlaps the bonding part, then the electrical connection is improved, but the stress transmission to sensor element increases
Solution Approach 1:
The coupling part is segmented into overlapping and non-overlapping regions relative to the bonding part. The non-overlapping second region breaks the continuous stress transmission path while the conductive member embedded in the coupling part ensures electrical connectivity is maintained through alternative pathways.
Solution Approach 2:
The conductive member acts as an intermediary that provides electrical connection between the substrate and the electrode without requiring complete overlap with the bonding part. This intermediary allows the coupling part to be structurally connected while electrically connected through a different path, isolating the sensor element from stress.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively minimizes stress influence on the sensor elements, enhancing detection accuracy and reliability by preventing stress-induced changes in capacitance and maintaining high-quality inertial sensor performance.
Implementation Method 1
a first coupling part bonded to the first mount through a first bonding part
Implementation Method 2
a lid that faces the substrate and that includes a conductive member electrically coupling the substrate side and the opposite side from the substrate
Implementation Method 3
an electrode including electrode fingers electrically coupled to the first coupling part
Data Source
AI summary
An inertial sensor includes: a base including a mount and a mount; a lid including a conductive member; and a sensor element coupled to the mount, the mount, and the conductive member. The sensor element includes a conductor bonded to the mount through a bonding part and coupled to the conductive member, a movable electrode including electrode fingers electrically coupled to the conductor, and a supporter provided between the movable electrode and the conductor and bonded to the mount through a bonding part. The supporter includes, in a plan view, a first part of the supporter overlapping the bonding part, and a second part of the supporter not overlapping the bonding part. The second part of the supporter is formed with a slit serving as a first through hole.