Inflatable Seal for HAMR Media Cooling
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Solution Overview
Problem
In the manufacturing of media, such as heat-assisted magnetic recording (HAMR) media, there is a need for efficient cooling of workpieces after heating processes like sputtering, as existing cooling methods may not adequately manage heat transfer and retention.
Innovation Solution
An apparatus featuring inflatable seals surrounding cooling plates within a cooling chamber, which initially deflate to allow workpiece positioning and then inflate to form a gas channel for enhanced cooling by directing gas flow past the workpiece and cooling plates, improving heat absorption and retention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a carrier moves a workpiece between stations for heating and cooling processes, then the workpiece can undergo multiple processing steps, but the workpiece retains heat after heating which interferes with subsequent processing
Solution Approach 1:
The cooling chamber is segmented into multiple zones with separate cooling plates (first cooling plate, second cooling plate, third cooling plate) that can be independently controlled. Each cooling plate can be selectively cooled to different temperatures, allowing different regions of the workpiece to be cooled at different rates and to different target temperatures, thereby efficiently managing heat removal while maintaining processing throughput
Solution Approach 2:
Different regions of the cooling chamber provide different cooling characteristics. The first cooling plate provides initial cooling, while the second and third cooling plates provide additional cooling zones. This local differentiation of cooling quality allows precise temperature control of the workpiece at different stages of the cooling process
2Temperature
If cooling plates are used to cool the workpiece, then heat transfer occurs from the workpiece to the cooling plates, but direct contact between the carrier and cooling plates may cause contamination or interference
Solution Approach 1:
A gas medium serves as an intermediary between the cooling plates and the workpiece/carrier. The gas channels distribute cooling gas across the cooling plates, enabling indirect cooling where heat is transferred from the workpiece through the gas medium to the cooling plates, eliminating direct contact and associated contamination risks while maintaining effective heat transfer
Solution Approach 2:
The system uses pneumatic cooling by circulating gas through channels in the cooling plates and across the workpiece area. This pneumatic approach enables controlled cooling through gas flow without mechanical contact, reducing contamination and allowing for precise control of the cooling process
3Ease of operation
If the cooling chamber is designed to accommodate the carrier and workpiece, then the workpiece can be positioned for cooling, but the chamber must be large enough which increases its size
Solution Approach 1:
The cooling chamber is segmented into functional zones with multiple cooling plates arranged in a compact configuration. This segmentation allows the chamber to accommodate the carrier and workpiece efficiently without requiring excessive volume, as each zone serves a specific cooling function and the overall layout is optimized for space utilization
Solution Approach 2:
The cooling plates are nested or arranged in a compact stacked configuration within the cooling chamber, with gas channels integrated within the plate structures themselves. This nesting approach maximizes the cooling surface area and functionality within a minimized chamber volume, allowing easy workpiece positioning without requiring a large chamber
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The inflatable seal system enhances cooling efficiency by creating a controlled gas channel that improves heat transfer from the workpiece to the cooling plates, ensuring effective cooling before further processing stages.
Implementation Method 1
The inflatable seal forms a gas channel between the first cooling plate and the second cooling plate when the inflatable seal is inflated
Implementation Method 2
In the cooling station, heat is absorbed from the workpiece and the workpiece is cooled
Data Source
AI summary
An apparatus includes a gas input and a cooling plate. A groove surrounds the gas input and less than one hundred percent of the cooling plate. An inflatable seal is in the groove.